Synthesis of metal oxide thin films
AssigneeCase Western Reserve University
InventorsMark R. DeGuire, Arthur H. Heuer, Chaim N. Sukenik
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Abstract
Iron and titanium oxide thin films are deposited onto functionalized self-assembled monolayers (SAMs) which are bonded to silicon or glass substrates. The resulting oxide thin films have ordered, uniform densely packed crystalline structures.
Claims25
A method for synthesizing a metal oxide thin film, comprising the steps of:
- providing a substrate having an oxide layer at its surface;
- covalently bonding a first end of a chain hydrocarbon to the surface of the substrate, the first end of the chain hydrocarbon having a first functional group which covalently bonds with the oxide at the substrate surface, a second end of the chain hydrocarbon having a second functional group providing a bonding site for a metal oxide in solution;
- and
- depositing metal oxides on the second functional groups.
A method for synthesizing a thin film metal oxide, comprising the steps of:
- forming a self-assembled monolayer on a surface of a substrate;
- immersing the substrate and self-assembled monolayer into an organometallic or aqueous salt solution;
- and
- depositing a metal oxide film on the self-assembled monolayer.
A method for synthesizing a metal oxide thin film, comprising the steps of:
- providing a substrate having an oxide layer at its surface;
- covalently bonding a first end of a chain hydrocarbon to the surface of the substrate, the first end of the chain hydrocarbon having a first functional group which covalently bonds with the oxide at the substrate surface, a second end of the chain hydrocarbon having a second functional group providing a bonding site for metals in solution wherein the second functional group is COOH;
- and
- forming metal oxides on the second functional groups.
A method for synthesizing a metal oxide thin film, comprising the steps of:
- providing a substrate having an oxide layer at its surface;
- covalently bonding a first end of a chain hydrocarbon to the surface of the substrate, the first end of the chain hydrocarbon having a first functional group which covalently bonds with the oxide at the substrate surface, a second end of the chain hydrocarbon having a second functional group providing a bonding site for metals in solution wherein the second functional group is SO.sub.3 H;
- and
- forming metal oxides on the second functional groups.
A method for synthesizing a metal oxide thin film, comprising the steps of:
- providing a substrate having an oxide layer at its surface;
- covalently bonding a first end of each of a plurality of chain hydrocarbons to the surface of the substrate, the first end of the chain hydrocarbon having a first functional group which covalently bonds with the oxide at the substrate surface, a second end of each chain hydrocarbon having a second functional group providing a bonding site for metals in solution;
- crosslinking the chain hydrocarbons along the surface of the substrate, the chain hydrocarbons being uniformly spaced from one another;
- and
- forming metal oxides on the second functional groups wherein a plurality of metal oxides bond to the hydrocarbons and to one another to provide a uniform ordered arrangement defined by the uniform arrangement of the hydrocarbons.
A method for synthesizing a thin film metal oxide, comprising the steps of:
- forming a self-assembled monolayer on a surface of a substrate;
- immersing the substrate and self-assembled monolayer into an organometallic or aqueous salt solution;
- forming a metal oxide film on the self-assembled monolayer;
- and
- subsequently heating the film to burn away the self-assembled monolayer, leaving the metal oxide film bonded directly to the substrate.
A method for synthesizing a thin film metal oxide, comprising the steps of:
- forming a self-assembled monolayer on a surface of a substrate;
- immersing the substrate and self-assembled monolayer into an organometallic or aqueous salt solution;
- and
- forming a metal oxide film on the self-assembled monolayer, wherein an ordered surface arrangement on the self-assembled monolayer induces crystallinity in forming the metal oxide film.
Dependencies are inferred from the claim text.