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US 5,352,477 AGranted
Method for manufacturing a cathode for a gas discharge tube
AssigneeMatsushita Electronics Corporation
InventorHiroshi Sakurai
Life of this patent
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Abstract
A gas discharge tube using a tunnel effect type electron emitting device as a cathode is provided. The electron emitting device comprises a conductive metal base and a dielectric film formed preferably of a material containing MgO as a main component on the metal base. The dielectric film faces an anode and is exposed to a gas in the tube. In the cathode of this structure, discharge is effected at a relatively low DC voltage.
Claims1
A method for manufacturing a cathode for a gas discharge tube comprising the steps of:
- forming a film made of a material containing Mg as a main component on the surface of a conductive metal base,
- diffusing part of a component of the metal base to part of the film to form an intermediate layer containing Mg,
- oxidizing the remaining part of the film to form a dielectric film made of a material containing MgO as a main component.
Dependencies are inferred from the claim text.