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US 5,351,279 AGranted
X-ray microscope with a direct conversion type x-ray photocathode
AssigneeCSL Opto-Electronics Corp.
InventorsYongzheng She, Shizheng Chen, Weilou Cao, Yanhua Shih
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Abstract
A direct conversion X-ray photo-electron cathode has specially designed secondary electron emission layers which provides high efficiency, low noise, high speed and broad band X-ray photon detection. The X-ray photocathode is integrated with a micro channel plate and an output phosphor display screen to form a panel type X-ray intensifier. The X-ray intensifier is combined with a micro-focus X-ray source to provide projection type X-ray microscope for use in X-ray microscopic diagnostic applications.
Claims2
A portable projection type real time X-ray microscope, comprising:
- an X-ray source having a micron focal spot size;
- a workpiece for holding an item to be investigated;
- an X-ray direct conversion type image intensifier;
- a movable parabolic illuminator in optical alignment with the X-ray image intensifier, for optically aligning the X-ray image intensifier with the object under investigation on the test workpiece, whereby upon moving the illuminator out of the alignment path of the X-ray source the X-ray test may be conducted on the test object;
- illuminator moving means for moving the illuminator out of the alignment path during X-ray testing of the test object;
- adjustment means for vertically moving said workpiece between the X-ray source and the parabolic illuminator for controlling the magnification of the X-ray image.
3 more elements
Dependencies are inferred from the claim text.