US 5,350,920 AGranted

Ion beam analyzing apparatus

AssigneeKabushiki Kaisha Kobe Seiko Sho

InventorsHirofumi Fukuyama, Tatuya Noguchi, Kenichi Inoue, Kiyotaka Ishibashi, Shigeto Adachi

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Abstract

An ion beam analyzing apparatus wherein a scan image displayed on display means and the profile of an ion beam can be made coincide with each other readily to assure a high operability. Slit members for X and Y directions of an objector collimator are provided for movement to vary the dimensions of slits defined thereby, and dimensions A and B of the slits in the X and Y directions are detected. Dimensions X' and Y' of a spot of an ion beam irradiated upon a specimen on a target are calculated by multiplying the dimensions A and B by reduction ratios fx and fy of quadruple pole magnetic lenses, respectively, and then the dimensions X' and Y' are multiplied by values obtained by division of conditions Cx and Cy of an image apparatus by current scanning widths Sx and Sy of deflecting electrodes to calculate enlarged beam spot diameters X" and Y" respectively. An image having the diameters X" and Y" is displayed on a cathode ray tube so that an operator can visually grasp it. Consequently, a scan image of the specimen and the profile of the ion beam can be made coincide readily with each other by manual operation of a manually operable mechanism of a beam position setter.

Claims7

Dependent claims

An ion beam analyzing apparatus for irradiating an ion beam upon a specimen to analyze a small area of the specimen, comprising:

an ion accelerator for accelerating ions generated from an ion source to form an ion beam;
a vacuum chamber for accommodating therein a specimen to be analyzed, said vacuum chamber including a secondary electron detector;
an objective collimator interposed between said ion accelerator and said vacuum chamber for varying a size of a slit of a slit device to restrict the ion beam;
a magnetic lens interposed between said ion accelerator and said vacuum chamber for converging and irradiating the ion beam upon the specimen in said vacuum chamber to form a beam spot on the specimen;
a deflecting electrode device disposed between said ion accelerator and said vacuum chamber for scanning the beam spot on the specimen when a high frequency potential is applied thereto or a high frequency current is supplied thereto;
display means for displaying thereon a position of the beam spot on the specimen and a detection signal detected by said secondary electron detector in synchronism with the deflecting electrode device as a secondary electron image;
and
calculating means for calculating dimensions of the beam spot in accordance with size data of said slit of said slit device and displaying on the display means an image in accordance with the thus calculated dimensions of the beam spot.

5 more elements

Dependencies are inferred from the claim text.

Facts

Application: 07/994,953Filed 22 Dec 1992
Priority: JP 3-34335825 Dec 1991
Granted: 27 Sep 1994
Term ends: Not estimatedThe source records don’t support an estimate.

Classification4 codes

H01J 37/263
Details: contrast, resolution or power of penetration
H01J 37/22
Details: optical , image processing or photographic arrangements associated with the tube
H01J 37/256
Tubes for spot-analysing by electron or ion beams; Microanalysers: using scanning beams
H01J
Electric discharge tubes or discharge lamps

Family

No related US applications are recorded in the indexed filing history.

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