Purification of trialkylgallium, synthesis of trialkylgallium
AssigneeCVD Incorporated
InventorsRavindra K. Kanjolia, Benjamin C. Hui, William B. Grant
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Abstract
Trialkylgallium is purified of group II B p-type impurities, particularly Zn, Hg, and Cd, by contacting the trialkylgallium with a metallic gallium-containing melt. Also, trialkylgallium can be produced by contacting a dialkyl group II B compound with a metallic gallium-containing melt.
Claims12
A method of removing group II B impurities in the form of dialkyl group II B compounds from a trialkyl group III A compound having unacceptably high levels of said impurities, including zinc impurities, the method comprising contacting said trialkyl group III A compound with a metallic gallium-containing melt which comprises at least about 10 wt. % indium for a time sufficient to reduce the level of zinc to about 0.5 ppm or below.
A method of removing group II B impurities in the form of dialkyl group II B compounds from a trialkyl group III A compound having unacceptably high levels of said impurities, including zinc impurities, the method comprising contacting said trialkyl group III A compound with a metallic gallium-containing melt which further contains an oxygen-gettering metal for a time sufficient to reduce the level of zinc to about 0.5 ppm or below.
A method of producing a trialkylgallium comprising contacting a dialkyl group II B compound with a melt containing at least a stoichiometric amount of gallium for a time sufficient to react substantially all of said dialkyl group II B compound with gallium to produce trialkylgallium and metallic group II B element.
Dependencies are inferred from the claim text.