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AssigneeHoechst Aktiengesellschaft
InventorErnst-Gunther Schlosser
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In the device for producing thin films of metal oxides from organic metal compounds on a substrate, there is a truncated pyramidal hollow body (3) in an evacuable housing (1). Disposed concentrically with respect to the axis of symmetry (16) of the hollow body (3) in its base (7) are at least three furnaces (8) which have reception devices (9) for the metal compounds (10) to be evaporated. The reception devices (9) are provided with guide pipes (11) which project into the hollow interior of the hollow body (3) and are inclined towards its axis of symmetry (16). The casing (12) of the truncated pyramid merges into a pipe (13) above whose end there is disposed a heatable reception device (5) for the substrate (4). A gas feed pipe (6) terminates in the hollow interior [sic] of the hollow body (3) between the guide pipes (11) and the end of the pipe (13).
Device for producing thin films of mixed metal oxides from organic metal compounds on a substrate, characterized in that there is, in an evacuable housing (1), a truncated frustum shaped hollow body (3) formed from a casting (12), having a base (7) and an axis of symmetry (16), in which there are disposed, on a circumference of a circle that is concentric with the axis of symmetry (16),
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