Building and method for manufacture of integrated semiconductor circuit devices

A method of building a plant for the manufacture of integrated semiconductor devices for an initial phase of low volume manufacturing capability and later converting to a high volume final phase of manufacturing capability that provides a minimum disruption of the operating manufacturing line and the expenditure of a minimum initial capitol investment, comprising:

• constructing a containment building having a (1) manufacturing equipment floor, and (2) a lower basement floor beneath the manufacturing equipment floor;
• constructing an enclosed process aisle, including a ceiling, on said manufacturing floor;
• constructing a plurality of spaced tunnels, each tunnel including walls and a ceiling, opening into said aisle, said tunnels each adapted to contain manufacturing equipment or to have access to manufacturing equipment through tunnel walls;
• constructing a means to provide a clean air environment within said aisle and tunnels, said means to provide clean air including a plenum system over said ceilings, openings in said ceilings, a means to force air into said plenum through said openings into said tunnel and aisle, and a means to exhaust air from said tunnels and aisle;
• constructing walls across said tunnels that separate the total area of the tunnels into (1) initial areas needed to accommodate the initial phase of manufacturing and (2) remaining areas that will ultimately be used along with the initial area for the final phase of manufacturing;
• providing manufacturing equipment within or accessible to said initial area of said tunnels;
• providing filters over said openings in said ceilings of said aisle and ceilings of said initial areas of said tunnels;
• providing air impervious panels over said openings in said ceilings over said remaining areas of said tunnels;
• providing complete fluid supply lines beneath the tunnels necessary to service all of the manufacturing equipment used in the initial phase and the equipment to be added for the final phase;
• providing plumbing connections and valves for joining said supply lines to said manufacturing equipment provided for said initial phase;
• and
• subsequently modifying the plant for the final phase of manufacturing by (1) installing manufacturing equipment in the remaining area of said tunnels, (2) connecting said fluid supply lines to the newly installed equipment, (3) removing said impervious panels from the openings in the ceilings over said remaining area, (4) covering the openings with air filters, and (5) opening said partitions in said tunnels.