Sensitive resistive pressure transducer

A resistive pressure transducer for measuring pressure comprising:

• a flexible diaphragm, having a first surface, a second surface, and an outer edge defining an outer diameter and a radius;
• means for mounting said diaphragm to a support;
• a plurality of resistive patterns deposited on the first surface of the diaphragm, the resistive patterns further comprising a first resistive pattern deposited in close proximity to the outer edge of the diaphragm, the first resistive pattern including a plurality of substantially radially-extending resistive segments, with alternate ends of said resistive segments being interconnected by conductive material, and a second resistive pattern deposited in close proximity to the center of the diaphragm;
• and
• means for coupling said resistive patterns to sense the differences in resistance of said patterns as said diaphragm flexes;
• wherein the means for coupling has a pre-determined resistivity and the plurality of resistive patterns have resistivities at least one hundred times greater than the pre-determined resistivity.

A method of forming a resistive pressure transducer comprising the steps of:

• providing a support member;
• mounting a flexible diaphragm to said support around the periphery of said diaphragm wherein the diaphragm has a first surface and a second surface;
• depositing a conductive material layer on the diaphragm first surface;
• depositing a resistive configuration on the diaphragm first surface, wherein the step of depositing a resistive pattern further includes the steps of
• depositing a first curved resistance pattern in close proximity to the outer edge of the diaphragm, and wherein the first curved resistive pattern is comprised of a first plurality of substantially radially-extending resistors spaced apart along the periphery of the diaphragm;
• interconnecting alternate ends of successive segments of the first plurality of resistors with the conductive material;
• depositing a second curved resistive pattern in close proximity to the center of the diaphragm;
• depositing a third curved resistive pattern in close proximity to the outer edge of the diaphragm and wherein the third curved resistive pattern is comprised of a third plurality of substantially radially-extending resistors spaced apart along the periphery of the diaphragm;
• interconnecting alternate ends of successive segments of the third plurality of resistors with the conductive material;
• depositing a fourth curved resistive pattern in close proximity to the center of the diaphragm;
• and
• coupling the four curved resistive patterns in a Wheatstone bridge configuration such that each resistive pattern forms a separate leg of the bridge;
• wherein the conductive material has a pre-determined resistivity and each of the four resistive patterns has a resistivity at least one hundred times greater than the pre-determined resistivity.

A resistive pressure transducer for measuring pressure comprising:

• a substrate having an upper surface and a lower surface;
• a flexible diaphragm, having a first surface, a second surface, and an outer edge defining an outer diameter and a radius, wherein the diaphragm is mounted in a spaced apart relationship to the upper surface of the substrate;
• a plurality of resistive patterns deposited on the first surface of the diaphragm, the resistive patterns further comprising a first resistive pattern deposited in close proximity to the outer edge of the diaphragm, the first resistive pattern including a plurality of substantially radially-extending resistive segments, with alternate ends of said resistive segments being interconnected by conductive material, and a second resistive pattern deposited in close proximity to the center of the diaphragm;
• and
• means for coupling said resistive patterns to sense the differences in resistance of said patterns as said diaphragm flexes;
• wherein at least one resistive pattern comprises three interconnected resistive segments;
• wherein the means for coupling has a pre-determined resistivity and the plurality of resistive patterns have resistivities at least one hundred times greater than the pre-determined resistivity.