Information detection apparatus and displacement information measurement apparatus
AssigneeCanon Kabushiki Kaisha
InventorsToshimitsu Kawase, Akihiko Yamano, Ryo Kuroda, Hiroyasu Nose, Toshihiko Miyazaki
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AssigneeCanon Kabushiki Kaisha
InventorsToshimitsu Kawase, Akihiko Yamano, Ryo Kuroda, Hiroyasu Nose, Toshihiko Miyazaki
Estimating the term…
An information detection apparatus is disclosed. A plurality of probes are arranged in the apparatus so as to face a medium which carries an information, Each of the plurality of probes produces a detection signal from the medium. A performance testing device is provided in the apparatus for testing the performance of each of the plurality of probes. A detection device in the apparatus selects the signal from at least one normal probe on the basis of the test result of the testing device and detects the information in accordance with the selected signal. By such the construction in the apparatus, the detection of the information can be continuously effected even if one of the probes is broken.
An apparatus for detecting information from an information bearing medium, comprising:
An apparatus for detecting displacement information between two objects based on information from a scale imparting a positional reference, comprising:
A method for detecting information from an information bearing medium, comprising the steps of:
An apparatus for transferring information between a medium and a probe, comprising:
Dependencies are inferred from the claim text.