Pre-stressed pressure transducer and method of forming same

A pre-stressed capacitive pressure transducer capable of withstanding high pressure, said transducer comprising:

• a flexible diaphragm;
• at least one fixed disk mounted spaced on one side of said diaphragm, said diaphragm and said disk having conductive plates thereon, so that the capacitance between said conductive plates varies as said diaphragm flexes;
• sealing means for securing together and spacing apart said diaphragm and said disk;
• upper and lower cylindrical pre-stress members overlapping one another, substantially surrounding and applying inwardly directed force to outer surfaces of said diaphragm and said disk;
• securing means for securing said pre-stress members together under a substantial compressive force to thereby apply the force to said diaphragm, said disk and said sealing means;
• wherein said pre-stress members protect said transducer against failure of said sealing means under high internal pressure;
• a pressure input flange for applying pressure to be measured by said transducer, said input flange having an inner surface adjacent an outer surface of said disk;
• sealing means for sealing together said input flange inner surface and said disk outer surface;
• and
• securing means for securing said pressure input flange to said disk and said diaphragm;
• wherein at least one of said pre-stress members includes an outer surface which is positioned and configured to contact an inner surface of said pressure input flange in the event an excessively high external pressure is applied to said transducer, wherein further movement of said disk in contact with said pre-stress member is prevented, thereby limiting the amount of external pressure transmitted to said diaphragm, and said sealing means securing together and spacing apart said diaphragm and said disk.

A pre-stressed capacitive pressure transducer capable of withstanding high pressure, said transducer comprising:

• a flexible ceramic diaphragm;
• a pair of fixed ceramic disks mounted spaced on either side of said diaphragm, said diaphragm and at least one of said fixed disks having conductive plates thereon, so that the capacitance between said conductive plates varies as said diaphragm flexes;
• a pair of glass frit seals which secure together and space apart said diaphragm and said disks;
• pressure means for applying pressure to be measured to said diaphragm;
• upper and lower pre-stress members directly bearing on outer peripheries of said disks;
• and
• securing means for securing said pre-stress members together under a substantial compressive force, said compressive force thereby being applied to said disks and said diaphragm;
• wherein said pre-stress members protect said transducer against failure of said glass frit seals under high internal pressure;
• wherein at least one of said pre-stress members includes an outer surface which is positioned and configured to contact an inner surface of one of said input flanges in the event an excessively high external pressure is applied to said pressure transducer, wherein further movement of said disk in contact with said pre-stress member is prevented, thereby limiting the amount of external pressure transmitted to said diaphragm and said glass frit seals.