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US 5,349,443 AGranted
Flexible transducers for photon tunneling microscopes and methods for making and using same
AssigneePolaroid Corporation
InventorJohn M. Guerra
Life of this patent
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AssigneePolaroid Corporation
InventorJohn M. Guerra
Estimating the term…
A flexible transducer for use in a photon tunneling microscope apparatus, the transducer comprising an optically transmissive body having a totally internally reflecting (TIR) surface therein and a second surface plano-parallel to the TIR surface when the TIR surface and the second surface are in an unstressed state, the second surface comprising a combination light energy entrance surface and light energy exit surface, the TIR surface being oriented such that light energy introduced at the second surface within the critical angle normally is reflected totally from the interior of the TIR surface to the second surface. A light pattern of variable intensity emerges from the second surface as a result of frustration of total internal reflection at the TIR surface occuring as the TIR surface is brought sufficiently proximate a sample surface. The flexible transducer and the TIR surface thereof are arranged and adapted to be brought into optical contact with, and to conform to, varied macrophotography configurations of the sample surface. The disclosure further relates to methods for making and using the flexible transducer.
A flexible optical transducer for use with a photon tunneling microscope of the type having a hemispherical objective lens with a planar front surface and a predetermined field of view, said transducer being made of a thin, flat member structured and arranged to have flexibility sufficient to conform to the macrotopography of a sample surface without conforming to its microtopography and stiffness to provide a substantially flat surface over an area of the planar front surface of the hemispherical objective lens corresponding to the field of view of the microscope when said transducer is brought into optical contact with the planar front surface with a fluid which matches the index between the two, said disposable transducer sufficiently thin so that when it is in place between the planar front surface of the microscope objective and overlying a sample, the evanescent field created by the photon tunneling effect is selectively disrupted in accordance with the variation in the microtopography of the sample to create an image which can be encoded in gray levels corresponding the depth of the sample microtopography.
In a transducer for use in a photon tunneling microscope having a hemispherical objective lens with a planar front surface and a predetermined field of view, said transducer comprising an optically transmissive flat, thin body having a totally internally reflecting surface and a second surface plano-parallel to said reflective surface when said reflective surface and said second surface are in an unstressed state, said second surface comprising a combination light energy entrance surface and light energy exit surface, said reflective surface being oriented such that light energy introduced from the microscope at said second surface is reflected totally from the interior of said reflective surface to said second surface such that a light pattern of variable intensity emerges from said second surface as a result of frustration of total internal reflection said reflective surface as said reflective surface is brought sufficiently proximate a sample surface said transducer being flexible and said reflective surface thereof arranged and adapted to be brought into optical contact with, and to conform to, varied configuration of the sample surface microtopography.
An assembly for photon tunneling microscopic imaging, said assembly comprising:
The assembly of claim 26 wherein a distal outside surface of said transducer is adapted to engage said sample surface and substantially conform thereto, and is sufficiently stiff to provide a substantially flat surface over the field of view of said photon tunneling microscope.
An assembly for photon tunneling microscopic imaging, said assembly comprising:
An assembly for production of microlithographic structures, said assembly comprising a photon tunneling microscope, an objective portion of said microscope having as a portion thereof a flexible optical transducer, an illuminator fixed to said microscope and adapted to provide light energy to said microscope, said illuminator having a field stop plane adapted to receive a pattern member, a semiconductor wafer with a photoresist material layer thereon disposed proximate a focal point of said microscope, said transducer being adapted to contact, and substantially conform to, said photoresist material layer on said semiconductor wafer, whereby light from said illuminator is directed through said pattern, and through said microscope, and through said flexible transducer in engagement with said photoresist material layer on said semiconductor wafer, onto said photoresist layer of said semiconductor wafer, to provide a basis for completion of said microlithographic structure.
A method for imaging microtopography of a sample surface, said method comprising:
A method for imaging microtopography of a sample surface by photon tunneling means, said method comprising the steps of
Dependencies are inferred from the claim text.