A method of testing a semiconductor integrated circuit device in which internal circuits of the semiconductor integrated circuit device are supplied, in a normal operation, with a constant internal power supply voltage generated from an external power supply voltage in accordance with a first characteristic line defining a relationship between the external power supply voltage and the internal power supply voltage, said method comprising the steps of:
- generating a burn-in voltage from the external power supply voltage having a level higher than that used in the normal operation in accordance with a second characteristic line defining a relationship between the external power supply voltage and the internal power supply line, the second characteristic line crossing the first characteristic line at an intermediate point between lower and upper limit voltages defined by the first characteristic line, the burn-in voltage being greater than the internal power supply voltage used in the normal operation;
- and
- applying the burn-in voltage to the internal circuits of the semiconductor integrated circuit device.