Photoelectric conversion device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorShunpei Yamazaki
Life of this patent
Estimating the term…
Loading patent…
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorShunpei Yamazaki
Estimating the term…
A photoelectric conversion device has a non-single-crystal semiconductor laminate member formed on a substrate having a conductive surface, and a conductive layer formed on the non-single-crystal semiconductor laminate member. The non-single-crystal semiconductor laminate member has such a structure that a first non-single-crystal semiconductor layer having a P or N first conductivity type, an I-type second non-single-crystal semiconductor layer and a third non-single-crystal semiconductor layer having a second conductivity type opposite the first conductivity type are laminated in this order. The first (or third) non-single-crystal semiconductor layer is disposed on the side on which light is incident, and is P-type. The I-type non-single-crystal semiconductor layer has introduced thereinto a P-type impurity, such as boron which is distributed so that its concentration decreases towards the third (or first) non-single-crystal semiconductor layer in the thickwise direction of the I-type layer.
A semiconductor device comprising::
A semiconductor device comprising:
A semiconductor device comprising:
A semiconductor device formed on a substrate, comprising at least an intrinsic type non-single crystalline semiconductor layer, wherein a concentration of oxygen in said semiconductor layer is only 5.times.10.sup.19 atoms/cm.sup.3 or less.
A semiconductor device formed on a substrate, comprising at least an intrinsic type non-single crystalline semiconductor layer, wherein a concentration of carbon in said semiconductor layer is only 4.times.10.sup.18 atoms/cm.sup.3 or less.
A semiconductor device formed on a substrate, comprising at least an intrinsic type non-single crystalline semiconductor layer, wherein a concentration of phosphorus in said semiconductor layer is only 5.times.10.sup.18 atoms/cm.sup.3 or less.
A semiconductor device comprising:
A semiconductor device comprising:
A semiconductor device comprising:
A semiconductor device comprising:
A semiconductor device comprising:
A semiconductor device comprising:
A semiconductor device comprising:
A semiconductor device comprising:
A semiconductor device comprising::
Dependencies are inferred from the claim text.