Diffraction grating rotary speed sensor having a circumferentially variable pitch diffraction grating

Abstract

Optical measuring devises for measuring the angular position and rotation rate of a shaft 14. The shaft 14 has a variable pitch diffraction grating 22 etched on one end 16. The pitch gradient of the diffraction grating 22 varies as a function of circumferential position on the shaft 14. A monochromatic light source such as laser source 50 provides incident beam 20 which strikes grating 22. A diffracted light beam 26 from a the grating 22 strikes a position detector 61 at varying positions depending on the angular position of the shaft 14. By employing a position detector 61 which is sensitive to the position of the diffracted beam 26, a continuous position indicator of the shaft angular rotation is possible. A microprocessor calculates shaft position and rotation rates from the data supplied from the beam position detectors.

Dependencies are inferred from the claim text.