High-packing silicon nitride powder and method for making
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsHaruyoshi Kuwabara, Akio Otsuka, Yasuyuki Maki, Meguru Kashida
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AssigneeShin-Etsu Chemical Co., Ltd.
InventorsHaruyoshi Kuwabara, Akio Otsuka, Yasuyuki Maki, Meguru Kashida
Estimating the term…
High-packing silicon nitride powder is prepared by reacting metallic silicon powder having a mean particle size of 1 to 10 .mu.m and a purity of at least 99% directly with nitrogen for forming silicon nitride powder, milling the silicon nitride powder in a dry attritor until the tap density exceeds 0.9 g/cm.sup.3 and the content of particles having an aspect ratio of up to 3 exceeds 95% by weight, and further milling the silicon nitride powder in a wet attritor for finely dividing coarse particles having a particle size of at least 2 .mu.m. The silicon nitride powder has a tap density of at least 0.9 g/cm.sup.3 and a mean particle size of 0.4 to 0.6 .mu.m and contains at least 95% by weight of particles having an aspect ratio of up to 3 and up to 5% by weight of coarse particles having a particle size of at least 2 .mu.m. The powder is moldable into a high density compact, from which a sintered part having improved dimensional precision and strength is obtained.
A silicon nitride powder having a tap density of at least 0.9 g/cm.sup.3 and a mean particle size of 0.4 to 0.6 .mu.m,
A method for preparing silicon nitride powder having a tap density of at least 0.9 g/cm.sup.3, a mean particle size of 0.4 to 0.6 .mu.m and a BET specific surface area of 12-15 m.sup.2 /g comprising the steps of:
Dependencies are inferred from the claim text.