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US 5,348,631 AGranted
Method and apparatus for synthesizing lead .beta.-diketonates
AssigneeSharp Kabushiki Kaisha
InventorsSeshu B. Desu, May Nyman, Pradyot A. Agaskar
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Abstract
A method and apparatus for the synthesis of .beta.-diketonates such as Pb(fod).sub.2 and Pb(thd).sub.2 for use as precursors in metalorganic chemical vapor deposition processes. Lead oxide and a medium of pentane and a protonated ligand (H-fod or H-thd) are combined in a flask and subjected to reaction-promoting ultrasonic waves. The flask is immersed in a water bath to maintain a constant cool temperature, and the flask may include one or more arms for cooling and circulation of the medium during the reaction.
Claims10
A method of producing a lead .beta.-diketonate, comprising:
- combining lead oxide with a medium;
- subjecting the combined lead oxide and medium to ultrasonic waves, and recovering said lead .beta.-diketonate.
Dependencies are inferred from the claim text.