Polishing apparatus
AssigneeCanon Kabushiki Kaisha
InventorsMasahiko Miyamato, Nobuo Nakamura, Jyunji Takashita, Manabu Ando, Katsuo Kawano, Yoshiaki Nishimura, Satoshi Yuasa
Life of this patent
Estimating the term…
Abstract
There is disclosed a polishing apparatus utilizing a gel material as the polishing tool, in which the gel material is rotated in the vicinity of a surface to be polished, or is given rotating and rocking motions in direct contact with the surface to be polished.
Claims3
A method of working a workpiece with a polishing tool, comprising the steps of:
- using a polishing tool having a polishing surface attached thereto;
- providing the polishing tool with a closed loop electronic feedback system;
- pressing the polishing tool onto a position of a surface of the workpiece to be polished using a pressing device;
- detecting a pressing force acting in an axial direction of the polishing tool on the surface using a sensor mounted on the polishing tool and electronically connecting to the feedback system;
- obtaining correction information by comparing a signal corresponding to the pressing force detected by the sensor and sent through the feedback system with a signal corresponding to a predetermined pressure;
- and
- adjusting the pressing force applied from the pressing device to the polishing tool on the basis of the correction information.
A method of working a workpiece with a polishing tool, the polishing tool being moved on a surface of the workpiece to be worked by moving means, comprising the steps of:
- using a polishing tool having a polishing surface attached thereto;
- providing the polishing tool with a closed loop electronic feedback system;
- pressing the polishing tool onto a working position of the surface to be worked using pressing means;
- detecting an actual pressing force of the polishing tool on the surface using a sensor mounted on the polishing tool and electronically connected to the feedback system;
- obtaining deviation correction information indicating a deviation of the polishing tool from a predetermined working position by comparing a signal corresponding to the pressing force detected by the sensor and sent through the feedback system with a signal corresponding to a predetermined pressure;
- and
- controlling the moving means on the basis of the deviation correction information to adjust the working position of the polishing tool.
A method comprising the steps of:
- abutting an end of an inclined polishing tool against a surface of a workpiece to be polished, with the end of the polishing tool which abuts the surface to be polished having a curved surface;
- providing the polishing tool with a closed loop electronic feedback system;
- applying pressure from pressure applying means onto the other end of the polishing tool;
- detecting an amount of displacement of the polishing tool with respect to the surface of the workpiece with a detecting device directly attached to the polishing tool and electronically connecting to the feedback system;
- inputting a detection signal form the detecting means and sent through the feedback system to a correction value calculating device and obtaining a correction value corresponding to the amount of displacement;
- and
- adjusting the pressure of the pressure applying mean son the basis of the correction value to polish the workpiece.
Dependencies are inferred from the claim text.