Laser having at least one anode and one cathode for preionization and/or discharge
AssigneeLambda Physik Gesellschaft Zur Herstellung Von Lasern mbH
InventorsUlrich Rebhan, Frank Voss
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Abstract
Laser comprising at least one anode (1) and one cathode (2) for preionization and main discharge, the anode (1) and the cathode (2) having different standard potentials. The laser is distinguished by high reliability and long life. After several hours of operation, practically no material erosion at all is found at the electrodes.
Claims7
An excimer laser comprising at least one anode and one cathode for pre-ionization,
- wherein the surfaces of the anode and the cathode which are exposed to the pre-ionization spark are made of metallic materials of different standard potentials with said metallic cathode material having a higher standard potential than said metallic anode material.
An excimer laser comprising at least one anode and one cathode for a main discharge, wherein the surfaces of the anode and the cathode which are exposed to the main discharge are made of metallic material of different standard potentials with said metallic cathode material having a higher standard potential than said metallic anode material.
Dependencies are inferred from the claim text.