Powder agitator

Abstract

A powder agitator used for an ion implantation device or an ionized beam deposition device capable of exhibiting satisfactory powder agitating characteristics and minimizing positive charging on powders. The powder agitator includes a base, a vessel for receiving powders therein, a plurality of supports for supporting the vessel on the base, and a pair of piezoelectric elements arranged on the supports and functioning as a vibration generating section. Application of a voltage to the piezoelectric elements causes the vessel to be oscillated in a direction of rotation of the vessel and a speed of oscillation of the vessel to be varied depending on a direction of oscillation of the vessel, resulting in agitating the powders in the vessel.

Dependencies are inferred from the claim text.