Time-of-flight direct recoil ion scattering spectrometer
AssigneeArch Development Corporation
InventorsAlan R. Krauss, Dieter M. Gruen, George J. Lamich
Life of this patent
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Abstract
A time of flight direct recoil and ion scattering spectrometer beam line (10). The beam line (10) includes an ion source (12) which injects ions into pulse deflection regions (14) and (16) separated by a drift space (18). A final optics stage includes an ion lens and deflection plate assembly (22). The ion pulse length and pulse interval are determined by computerized adjustment of the timing between the voltage pulses applied to the pulsed deflection regions (14) and (16).
Claims25
A time-of-flight direct recoil ion scattering spectrometer, comprising:
- means for producing a paraxial beam of ions;
- means for pulsing said beam of ions, said pulsing means operative to dynamically adjust the interval between successive beam pulses in accordance with the combination of ion beam mass and energy to maximize repetition rate consistent with resolved data separation, said means for pulsing comprising a plurality of pulsed deflection plates separated from each other by an ion drift space for removing ions with laterally directed velocities;
- means for detecting particles emitted from a sample bombarded by said pulsed beam of ions;
- and
- means for providing differential pumping of an incoming ion beam path and an outgoing beam path of said spectrometer.
A method of performing time of flight direct recoil ion scattering spectrometry on a sample in a spectrometer, comprising the steps of:
- producing a pulsed paraxial beam of ions and further including the steps of dynamically adjusting at least one of the interval between successive beam pulses and beam width, said paraxial beam of ions being transmitted through apertures of a plurality of deflection plates by selected timed removal of deflection voltages applied to said deflection plates;
- detecting particles emitted from a sample bombarded by said pulsed beam of ions;
- and
- providing differential pumping of an incoming ion beam path and an outgoing beam path of said spectrometer.
A time-of-flight direct recoil ion scattering spectrometer, comprising:
- means for producing a paraxial beam of ions;
- means for detecting particles emitted from a sample bombarded by said pulsed beam of ions;
- a plurality of deflection plates for applying deflection fields to said beam of ions, said deflection plates separated from each other by an ion drift space for removing ions with laterally directed velocities;
- and
- means for providing differential pumping of an incoming ion beam path and an outgoing beam path of said spectrometer.
Dependencies are inferred from the claim text.