Apparatus for mixing liquids in a certain ratio
AssigneeGoldstar Electron Co., Ltd.
InventorDo H. Ryu
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AssigneeGoldstar Electron Co., Ltd.
InventorDo H. Ryu
Estimating the term…
An apparatus for mixing a deionized water and a hydrofluoric acid precisely in the ratio of 100:1, so as to produce a mixture which are properly used in etching wafters. The mixing apparatus comprises a self-lubricating plastic container of a double construction which enables to obtain a more precise quantity of liquid. The mixing apparatus also comprises an electronic balance measuring the weight of the liquid mixture, an indicator indicating numerically the weight measured by the balance, a mixing tank mixing the liquids, and control valves supplying the liquids in large and small quantities, respectively. According to this arrangement, it is possible to obtain a mixture of a large quantity liquid or a small quantity liquid in a precise mixing ratio with a tolerance of within 1%. Thereby, any poor etching of wafers can be avoided.
A liquid dispenser comprising:
An apparatus for mixing two liquids in a predetermined mixing ratio, comprising:
An apparatus for mixing a combination of liquid chemicals in a predetermined ratio, including
Dependencies are inferred from the claim text.