Miniature cryosorption vacuum pump
AssigneeThe United States of America as represented by the Department of Health and Human Services
InventorHarley V. Piltingsrud
Life of this patent
Estimating the term…
Abstract
A miniature cryosorption vacuum pump capable of producing intermediate vacuums on the order of about 10.sup.-2 to 10.sup.-4 torr is provided which includes a closed cycle Stirling cycle refrigerator. The overall weight of the miniature cryosorption vacuum pump (including the refrigerator) is less than about 2.5 kg, making the miniature cryosorption vacuum pump particularly suitable for portable or field use. The miniature cryosorption vacuum pump may be used as a roughing pump in various applications which require intermediate vacuum rough pumping or as a high vacuum pump where low pumping rates are required at pressures down to 5.times.10.sup.-5 torr.
Claims38
A miniature cryosorption vacuum pump comprising a cold finger having first and second ends, an adsorbent material surrounding one of said first and second ends of said cold finger, and a closed cycle Stirling cycle refrigerator connected to the other of said first and second ends of said cold finger, for lowering the temperature of said cold finger, said miniature cryosorption pump weighing no more than about 2.5 kg and having a lower operable temperature limit of about 70.degree. K.
A miniature cryosorption vacuum pump comprising a cold finger having first and second ends, an adsorbent material surrounding one of said first and second ends of said cold finger, a closed cycle Stirling cycle refrigerator connected to the other of said first and second ends of said cold finger, for lowering the temperature of said cold finger and means for moving said adsorbent material relative to said cold finger, wherein said means for moving said adsorbent material comprises a module containing said adsorbent material and magnetic means for moving said module.
A miniature cryosorption vacuum pump comprising a cold finger having first and second ends, an adsorbent material surrounding one of said first and second ends of said cold finger, and a closed cycle Stirling cycle refrigerator connected to the other of said first and second ends of said cold finger, for lowering the temperature of said cold finger in combination with a mechanical pump connected to said miniature cryosorption pump for applying a vacuum to said miniature cryosorption pump for regenerating said adsorbent material, said miniature cryosorption pump weighing no more than about 2.5 kg and having a lower operable temperature limit of about 70.degree. K.
A miniature cryosorption vacuum pump comprising a cold finger having first and second ends, an adsorbent material surrounding one of said first and second ends of said cold finger, a closed cycle Stirling cycle refrigerator connected to the other of said first and second ends of said cold finger, for lowering the temperature of said cold finger in combination with a high vacuum pump and a separate vacuum chamber wherein said miniature cryosorption pump is connected to said high vacuum pump for pumping sad high vacuum pump to an intermediate vacuum, and said high vacuum pump is connected to said separate vacuum chamber for pumping said chamber to a vacuum which is higher than said intermediate vacuum, said miniature cryosorption pump weighing no more than about 2.5 kg and having a lower operable temperature limit of about 70.degree. K.
A miniature cryosorption vacuum pump comprising a single stage cold finger having first and second ends, an adsorbent material surrounding one of said first and second ends of said single stage cold finger, and a closed cycle Stirling cycle refrigerator connected to the other of said first and second ends of said single stage cold finger, for lowering the temperature of said single stage cold finger.
A miniature cryosorption vacuum pump comprising a single stage cold finger having first and second ends, an adsorbent material surrounding one of said first and second ends of said single stage cold finger, and a closed cycle Stirling cycle refrigerator connected to the other of said first and second ends of said single stage cold finger, for lowering the temperature of said single stage cold finger in combination with a mechanical pump connected to said miniature cryosorption pump for applying a vacuum to said miniature cryosorption pump for aiding regenerating said adsorbent material.
A miniature cryosorption pump vacuum pump comprising a single stage cold finger having first and second ends, an adsorbent material surrounding one of said first and second ends of said single stage cold finger, and a closed cycle Stirling cycle refrigerator connected to the other of said first and second ends of said single stage cold finger, for lowering the temperature of said single stage cold finger in combination with a high vacuum pump and a separate vacuum chamber wherein said miniature cryosorption vacuum pump is connected to said high vacuum pump for pumping said high vacuum pump to an intermediate vacuum, and said turbomolecular pump is connected to said separate vacuum chamber for pumping said chamber to a vacuum which is higher than said intermediate vacuum.
Dependencies are inferred from the claim text.