Structure for shielding conductors
AssigneeMotorola, Inc.
InventorsShih-Wei Sun, Yasunobu Kosa, John R. Yeargain
Life of this patent
Estimating the term…
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AssigneeMotorola, Inc.
InventorsShih-Wei Sun, Yasunobu Kosa, John R. Yeargain
Estimating the term…
A shielding structure (10) and method of formation. The shielding structure (10) has a substrate (12). A first dielectric layer (14) overlies the substrate (12). A conductive layer (16) is formed overlying the dielectric layer (14), is patterned, and is etched to form electrically isolated conductive regions from conductive layer (16). The electrically isolated conductive regions have sidewalls and the etching of conductive layer (16) exposes portions of dielectric layer (14). The exposed portions of dielectric layer (14) are etched to form trenched portions of dielectric layer (14). A second dielectric layer (18) is formed overlying the electrically isolated conductive regions, including the sidewalls, and overlying the trenched portions to create recessed regions that separate the electrically isolated conductive regions. A shielding conductive layer (20) is formed overlying dielectric layer (18) and at least partially fills the recessed regions to shield the electrically isolated conductive regions from each another.
A structure for shielding comprising:
A structure comprising:
A semiconductor structure comprising:
Dependencies are inferred from the claim text.