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AssigneeHitachi, Ltd.
InventorsYusuke Yajima, Masakazu Ichikawa, Hiroyuki Shinada
Estimating the term…
An electron microscopic image observing method and an apparatus for carrying out the same enables the observation of an electron microscopic image of a specimen by irradiating the specimen with an electron beam and detecting the electron beam after it has transmitted through the specimen. The electron beam transmitted through the specimen is deflected so that the deflection thereof varies with time, and is allowed to pass through an aperture only when the deflection thereof is within a predetermined range of deflection, whereby the electron beam transmitted through the specimen and passed through the aperture is then detected. Thus, the electron microscopic image observing method and the apparatus for carrying out the same enables the observation of time-resolved electron microscopic images of a specimen having internal physical properties varying with time.
In an electron microscopic image observing method, wherein an electron beam is emitted so that the electron beam will pass through a specimen or through a region surrounding the specimen, and thereafter detected to form an electron microscopic image of the specimen,
An electron microscopic image observing apparatus which irradiates a specimen with a converged electron beam, detects the electron beam transmitted through the specimen and forms an electron microscopic image of the specimen for observation, said electron microscopic image observing apparatus comprising:
Dependencies are inferred from the claim text.