Single-source molecular organic chemical vapor deposition agents and use

A compound of the formula ##STR88## wherein:

• (a) M is selected from the group consisting of a Group IVA metal, a Group IVA metalloid, a Group IVB metal, a Group VB metal, and a Group VIB metal;
• (b) k=0-1;
• (c) Z is a nitrogen-bound, silicon-bound, or sulfur-bound ligand;
• (d) E.sub.c is selected from the group consisting of N, P, and As;
• (e) each E.sub.t is independently selected from the group consisting of N, P, As, and m=1;
• (f) each R.sup.1 is independently selected from the group consisting of hydrogen, (C.sub.1 -C.sub.20)alkyl, (C.sub.2 -C.sub.20)alkenyl, (C.sub.2 -C.sub.20)alkynyl, (C.sub.6 -C.sub.18)aryl, (C.sub.7 -C.sub.20)aralkyl, a (C.sub.5 -C.sub.18)heterocycle, and triorganosilyl;
• (g) n=1-4;
• and
• (h) each R.sup.2 is independently selected from the group consisting of hydrogen, (C.sub.1 -C.sub.20)alkyl, (C.sub.2 -C.sub.20)alkenyl, (C.sub.2 -C.sub.20)alkynyl, (C.sub.6 -C.sub.18)aryl, (C.sub.7 -C.sub.20)aralkyl, and a (C.sub.5 -C.sub.18)heterocycle.

A compound of the formula ##STR89## wherein:

• (a) M is selected from the group consisting of a lanthanide, an actinide, a Group IIIA metal, a Group IIIA metalloid, a Group IVA metal, a Group IVA metalloid, a Group VA metal, a Group VA metalloid, a Group IIIB metal, a Group IVB metal, a Group VB metal, a Group VIB metal, a Group VIIB metal, and a Group VIIIB metal;
• (b) k=0-1;
• (c) Z is selected from the group consisting of hydrogen, halide, and a ligand which bonds to M through N, O, P, S, As, Si, or C;
• (d) E.sub.c is N;
• (e) each E.sub.t is N or O, wherein at least one E.sub.t is N and at least one E.sub.t is O, with the proviso that
• (i) when E.sub.t is N, m=1;
• and
• (ii) when E.sub.t is O, m=0;
• (f) each R.sup.1 is independently selected from the group consisting of hydrogen, (C.sub.1 -C.sub.20)alkyl, (C.sub.2 -C.sub.20)alkenyl, (C.sub.2 -C.sub.20)alkynyl, (C.sub.6 -C.sub.18)aryl, (C.sub.7 -C.sub.20)aralkyl, a (C.sub.5 -C.sub.18)heterocycle, and triorganosilyl;
• (g) n=1-4;
• and
• (h) each R.sup.2 is independently selected from the group consisting of hydrogen, (C.sub.1 -C.sub.20)alkyl, (C.sub.2 -C.sub.20)alkenyl, (C.sub.2 -C.sub.20)alkynyl, (C.sub.6 -C.sub.18)aryl, (C.sub.7 -C.sub.20)aralkyl, and a (C.sub.5 -C.sub.18)heterocycle.

A compound of the formula ##STR90## wherein:

• (a) M is selected from the group consisting of a Group IVB metal, a Group VB metal, a Group VIB metal, a Group VIIB metal, a Group VIIIB iron group metal, and a Group VIIIB cobalt group metal;
• (b) k=0-1;
• (c) Z is selected from the group consisting of hydrogen, halide, and a ligand which bonds to M through N, O, P, S, As, Si, or C;
• (d) E.sub.c =E.sub.t =N;
• (e) m=1;
• (f) each R.sup.1 is independently selected from the group consisting of hydrogen, (C.sub.1 -C.sub.20)alkyl, (C.sub.2 -C.sub.20)alkenyl, (C.sub.2 -C.sub.20)alkynyl, (C.sub.6 -C.sub.18)aryl, (C.sub.7 -C.sub.20)aralkyl, a (C.sub.5 -C.sub.18)heterocycle, and a triorganosilyl;
• (g) n=1-4;
• and
• (h) each R.sup.2 is independently selected from the group consisting of hydrogen, (C.sub.1 -C.sub.20)alkyl, (C.sub.2 -C.sub.20)alkenyl, (C.sub.2 -C.sub.20)alkynyl, (C.sub.6 -C.sub.18)aryl, (C.sub.7 -C.sub.20)aralkyl, and a (C.sub.5 -C.sub.18)heterocycle.

A compound of the formula ##STR91## wherein:

• (a) M is selected from the group consisting of Ge and Sn;
• (b) k=0-1;
• (c) Z is selected from the group consisting of hydrogen, halide, and a ligand which bonds to M through N, O, P, S, As, Si, or C;
• (d) E.sub.c =E.sub.t =N;
• (e) m=1;
• (f) each R.sup.1 is independently selected from the group consisting of hydrogen, (C.sub.1 -C.sub.20)alkyl, (C.sub.2 -C.sub.20)alkenyl, (C.sub.2 -C.sub.20)alkynyl, (C.sub.6 -C.sub.18)aryl, (C.sub.7 -C.sub.20)aralkyl, a (C.sub.5 -C.sub.18 heterocycle, and triorganosilyl;
• (g) n=1-4;
• and
• (h) each R.sup.2 is independently selected from the group consisting of hydrogen, (C.sub.1 -C.sub.20)alkyl, (C.sub.2 -C.sub.20)alkenyl, (C.sub.2 -C.sub.20)alkynyl, (C.sub.6 -C.sub.18)aryl, (C.sub.7 -C.sub.20)aralkyl, and a (C.sub.5 -C.sub.18)heterocycle.

A compound of the formula ##STR92## wherein:

• (a) M is Ti;
• (b) k=1;
• (c) Z is selected from the group consisting of:
• (i) --N(R.sup.5).sub.2 wherein each R.sup.5 is independently selected from the group consisting of hydrogen and (C.sub.1 -C.sub.4)alkyl;
• and
• (ii) --SR.sup.6 wherein R.sup.6 is selected from the group consisting of (C.sub.1 -C.sub.10)alkyl, (C.sub.2 -C.sub.10)alkenyl, (C.sub.6 -C.sub.18)aryl, and (C.sub.7 -C.sub.20)aralkyl;
• (d) E.sub.c is N;
• (e) each E.sub.t is O, and m=0;
• (f) n=1-4;
• and
• (g) each R.sup.2 is independently selected from the group consisting of hydrogen, (C.sub.1 -C.sub.20)alkyl, (C.sub.2 -C.sub.20)alkenyl, (C.sub.2 -C.sub.20)alkynyl, (C.sub.6 -C.sub.18)aryl, (C.sub.6 -C.sub.20)aralkyl, and a (C.sub.5 -C.sub.18)heterocycle.