Microplastic structure and method of manufacture
AssigneeRohm and Haas Company
InventorWayne E. Feely
Life of this patent
Estimating the term…
Abstract
Thermally stable microplastic structures and methods for their manufacture are provided. The microplastic structures are prepared from crosslinkable photosensitive compositions using a specially designed radiation attenuating photomask which permits preselection of the size, length, width and thickness of the desired structure. The microplastic structures are stable at temperatures in excess of 200.degree. C. and can be used as components in miniature electrical, mechanical, chemical and optical devices, such as smart sensors integral to a silicon chip device.
Claims10
A process of forming a thermally stable microplastic structure from a photosensitive coating on a substrate surface, said microplastic structure having different selected thicknesses along its width and length, which process allows the selective manipulation of the final thickness of the microplastic structure at any point to any of at least two thicknesses in stepped transitions which comprises:
- a) depositing a photosensitive coating composition on a surface, said photosensitive coating composition comprising acid-hardening resin consisting essentially of from about 40 to about 99.9 weight percent of a crosslinkable polymer and from about 0.1 to about 60 weight percent of a photoacid generator, wherein said photoacid generator when exposed to an effective amount of actinic radiation produces an amount of acid effective to make said crosslinkable polymer crosslink upon heating to a temperature of from about 70 to about 120 degrees C.;
- then
- b) selectively exposing the layer of photosensitive coating to a controlled transmission of a sufficient amount of actinic radiation to reach different levels in the photosensitive coating deposited on the substrate to selectively manipulate the final thickness of the microplastic structure at different points on the surface of the resist to form a pattern composed of dark and light regions, and at least one region of an intensity between light and dark;
- c) controlling the duration of said exposing step so that the areas of the image that align with the light regions receive an amount of radiation effective to generate an effective amount of acid from the surface of the resist to a selected maximum depth in the resist, the areas of the image that align with the dark areas receive an effective amount of radiation to generate an effective amount of acid from the surface of the resist to a selected minimum depth in the resist and the areas of the image that receive attenuated amounts of radiation receive an effective amount of radiation to generate an effective amount of acid from the surface of the resist to a depth between the selected maximum and minimum depths;
- d) heating the resist to a temperature of from about 70 to about 120 degrees C. to crosslink the polymer in those regions that contain an effective amount of acid;
- and
- e) contacting the coating with aqueous solution to remove the uncrosslinked portions of the coating and thereby form the thermally stable microplastic structure on the substrate surface.
A process of forming a thermally stable microplastic structure from a coating of resist on a surface using near ultraviolet radiation, said microplastic structure having micron size dimensions and being isolated from surrounding areas of coating by essentially clear areas on the substrate, and having different selected thicknesses along its width and length, which process allows the selective manipulation of the final thickness of the microplastic structure at any point to any of at least two thicknesses in stepped transition which comprises:
- a) depositing a photosensitive coating composition on a surface, said photosensitive coating composition consisting essentially of from about 40 to about 99.9 weight percent of a crosslinkable polymer and from about 0.1 to about 60 weight percent of a photoacid generator, wherein said photoacid generator when exposed to an effective amount of near ultraviolet radiation produces an amount of carboxylic acid effective to make said crosslinkable polymer:
- i) more soluble in aqueous solution and
- ii) crosslink upon heating to a temperature of from about 70 to about 120 degrees C.;
- then
- b) selectively exposing a layer of resist to at least three different intensties of near ultraviolet radiation at different points on the surface of the resist to form an image that contains a pattern composed of dark and light regions, and at least one region of an intensity between light and dark, said pattern having a margin of dark region;
- c) controlling the duration of said exposing step so that the areas of the image that align with the light regions receive an amount of radiation effective to generate an effective amount of acid from the surface of the resist to a selected maximum depth in the resist, the areas of the image that align with the dark areas receive an effective amount of radiation to generate an effective amount of acid from the surface of the resist to a selected minimum depth in the resist, and those areas of the image that receive attenuated amounts of radiation receive an effective amount of radiation to generate an effective amount of acid from the surface of the resist to a depth between the selected maximum and minimum depths;
- then
- d) contacting the coating with aqueous solution to remove the exposed areas to the depths that have become more soluble in the solution due to presence of an effective amount of acid, leaving those parts of the coating that do not contain an effective amount of acid;
- then
- e) exposing the coating to a sufficient amount of near ultraviolet radiation to generate an effective amount of acid in the remaining areas of the resist;
- and
- f) heating the resist to a temperature of from about 70 to about 120 degrees C. to crosslink the polymer and thereby form the thermally stable microplastic structure on the substrate surface.
Dependencies are inferred from the claim text.