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AssigneeSeiko Instruments Inc.
InventorsMasataka Shinogi, Toshihiko Sakuhara, Masayuki Suda, Fumiharu Iwasaki, Akito Ando
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An electrochemical fine processing apparatus for electrochemically performing an adding processing and a removing processing of a substance such as a metal or a polymer in a solution in order to produce a structure having a high aspect ratio. Removing electrodes for applying an electric potential opposite to that applied to an addition electrode are disposed around the addition electrode, whereby an excess portion of metal or polymer film pattern can be scraped electrochemically. In addition, alternate electric potential pulses are applied successively to the addition electrode and then to the removing electrodes. It becomes possible to form on the support a structure with sharp pattern edge portions and a high aspect ratio.
An electrochemical fine processing apparatus for forming a film structure on a support comprising:
Dependencies are inferred from the claim text.