Molecular drag type vacuum pump
AssigneeThe BOC Group, Inc.
InventorNigel P. Schofield
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Abstract
A vacuum pump of the molecular drag type comprising a pump body, a cylindrical element adapted for rotation within the pump body about its longitudinal axis and having a plurality of circumferential slots defined in its surface which are substantially perpendicular to the longitudinal axis, a stator element held stationary with regard to the pump body and having projections extending into the slots substantially to fill the slots in the vicinity of the stator, wherein the cylindrical element comprises a co-axial assembly of a plurality of individual discs, each disc being spaced apart from its adjacent disc(s), thereby defining the circumferential slots between the discs.
Claims8
A vacuum pump of the molecular drag type comprising a pump body, a cylindrical shaft rotatably mounted within the pump body for rotation about its longitudinal axis, a plurality of individual discs coaxially assembled on said shaft in a spaced apart relationship to define circumferential slots therebetween, each of said discs having a sufficiently small thickness so as to be flexible when static, and a comb-like stator element connected to the pump body so as to be held stationary with regard to the pump body and having projections extending into the circumferential slots.
Dependencies are inferred from the claim text.