Thermal control of concentric tube liquid source gas lines
AssigneeMicron Technology, Inc.
InventorTimothy D. Gross
Life of this patent
Estimating the term…
Abstract
A double containment liquid source gas line uses an outer annular chamber which functions as a safety containment housing and a thermal control liner. The thermal control is accomplished by providing hot water and pumping the water in a closed loop configuration. The water serves to accurately and reliably control temperature of liquid source gas in the gas line. The water is in a closed loop system, so that, by providing leak detection equipment on the water line, faults in either chamber may be rapidly detected.
Claims17
Fluid transfer line having fluid supply and fluid discharge connections for a working fluid, and providing safety containment of a working fluid which is discharged from the line in a gaseous state, characterized by:
- a) concentric inner and outer chambers, configured such that, if the inner chamber develops a breach in its integrity, the inner chamber leaks to the outer chamber or the outer chamber leaks to the inner chamber, depending on the relative pressures of the inner and outer chambers, and the outer chamber contains any fluid which may leak from the inner chamber;
- b) working fluid supply and discharge connections communicating with the inner concentric chamber;
- c) the working fluid and discharge connections and the inner concentric chamber configured so as to establish working fluid flow in a downstream direction;
- d) the inner concentric chamber not communicating with the outer concentric chamber during a normal mode of operation;
- e) thermal control fluid inlet and outlet connections on the outer concentric chamber, said inlet being located at a location on the outer concentric chamber downstream of the outlet connection, thereby permitting a thermal control fluid to flow in the outer concentric chamber from the inlet connection to the outlet connection in an upstream direction with respect to the working fluid, the thermal control fluid comprising hot water and the outer chamber being used to flow the hot water around the inner chamber;
- f) a pump for causing the thermal control fluid to flow in said upstream direction;
- g) temperature maintenance means for bringing the thermal control fluid to a temperature which will maintain the thermal control fluid at a predetermined temperature when it reaches the thermal control fluid inlet connection, the temperature maintenance means being a water heater;
- h) means to detect a breach in the integrity of the inner chamber, including means for detecting presence of the working fluid within the outer concentric chamber, whereby the detection of the working fluid within the outer concentric chamber is used as indicator of failure and
- i) said working fluid, the working fluid being a liquid source gas.
Liquid source gas line having working fluid supply and fluid discharge connections, and providing safety containment of a working fluid which is discharged from the line in a gaseous state, characterized by:
- a) said working fluid;
- b) a first chamber for transferring said working fluid, wherein the working fluid is a liquid source gas;
- c) a second chamber for a heating fluid;
- d) working fluid supply and discharge connections communicating with the first chamber;
- e) the working fluid supply and discharge connections and the first chamber configured so as to establish working fluid flow in a downstream direction;
- f) the first and second chambers being configured such that, if the first chamber develops a breach in its integrity, the first chamber leaks to the second chamber or the second chamber leaks to the first chamber, depending on the relative pressures of the first and second chambers, and the second chamber contains any fluid which may leak from the first chamber;
- g) the first chamber in a heat transfer relationship with the second chamber, but otherwise not communicating with the second chamber during a normal mode of operation;
- h) heating fluid inlet and outlet connections on the second chamber, said inlet being located at a location on the second chamber downstream of the outlet connection, thereby permitting a heating fluid to flow in the second chamber from the inlet connection to the outlet connection in an upstream direction with respect to the working fluid;
- i) a pump for causing the heating fluid to flow in said upstream direction;
- j) a heater for heating the heating fluid to a temperature sufficient to maintain the heating fluid at a predetermined temperature when it reaches the heating fluid inlet connection;
- and
- k) means to detect a breach in the integrity of the inner chamber, including means for detecting presence of the working fluid within the outer concentric chamber, whereby the detection of the working fluid within the outer concentric chamber is used as indicator of failure, wherein
- a closed loop system is comprised of the second chamber, the pump and the heater, the closed loop system providing a supply of heating fluid at a substantially constant temperature.
Dependencies are inferred from the claim text.