Apparatus for accurately measuring the water content of gases
AssigneeSAES Getter S.p.A.
InventorsMarco Succi, Carolina Solcia, Fabrizio Doni, Antonio Coppola
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AssigneeSAES Getter S.p.A.
InventorsMarco Succi, Carolina Solcia, Fabrizio Doni, Antonio Coppola
Estimating the term…
An apparatus for accurately measuring the water content of a moist gas containing less than 50 parts per million (ppm) of water comprises an isothermal heat-sink (14), a radiator (20), a Peltier heater-cooler (24) thermally arranged between the isothermal heat-sink (14) and the radiator (20). The heater-cooler (24) is transferring heat from the isothermal heat-sink (14) to the radiator (20) and vice versa. A phosphoric acid moisture cell (32) is in thermal contact with the isothermal heat-sink (14). Upon passing the moist gas through the cell (32) the amount of moisture in the moist gas is measured as variation of electrical current throughout the cell.
An apparatus for accurately measuring, at a given measuring temperature within the range of about 0.degree. to about 20.degree. C., the water content of a moist gas containing less than 50 parts per million (ppm) of water comprising:
An apparatus for accurately measuring, at a given measuring temperature within the range of about 0.degree. to about 20.degree. C., the water content of a moist gas containing less than 50 parts per million of water comprising:
Dependencies are inferred from the claim text.