Method and apparatus for machining substrate plates for magnetic memory disks
AssigneeCorning Incorporated
InventorsMeryle D. Adler, Harold G. Shafer, Jr.
Life of this patent
Estimating the term…
Abstract
This invention relates to a method and apparatus for retaining disk-like structures, such as magnetic memory substrate plates, or disks, during machining, cutting, or grinding operations. A fluid is applied to one surface of the disk to retain the other surface of the disk against a chuck at a force which is sufficient to maintain the disk against the chuck during the operations.
Claims24
An apparatus for retaining, during processing, a disk-like structure having opposed major surfaces, comprising:
- a chuck having a surface for contacting at least a portion of one of the major surfaces of said structure;
- and
- a means for applying a flow of fluid to the other major surface of said structure, said flow of fluid sufficient to retain said structure against the contacting surface of said chuck during processing, said chuck contacting only the major surface of said disk-like structure, thereby exposing the entire peripheral edge of said structure for processing.
An apparatus for retaining a disk-like structure having opposed major surfaces during processing comprising:
- a disk support member, drivable about an axis, having a surface for contacting at least a portion of one of the major surfaces of said structure;
- and
- a fluid propelling means having a face, said face having at least one opening therein through which fluid is propelled on said structure, thereby retaining the structure against said disk support member.
A method of retaining a disk-like structure during machining operations comprising:
- providing a chuck, driveable about an axis, having a face thereon for contacting one side of said structure;
- positioning said one side of said structure against said face;
- and
- applying a fluid to the other side of the structure and thereby retaining the said structure against the flat face of said chuck.
An apparatus for retaining, during processing, a disk-like structure having opposed major surfaces, comprising:
- a chuck having a surface for contacting at least a portion of one of the major surfaces of said structure, said chuck surface comprising a plurality of vacuum connected openings thereon for applying a vacuum to one of the major surfaces of said disk-like structure;
- and
- a means for applying a flow of fluid to the other major surface of said structure, said flow of fluid sufficient to retain said structure against the contacting surface of said chuck during processing.
An apparatus for retaining, during processing, a disk-like structure having opposed major surfaces, comprising:
- a chuck having a surface for contacting at least a portion of one of the major surfaces of said structure, said chuck rotatable about an axis;
- and
- a means for applying a flow of fluid to the other major surface of said structure, said flow of fluid sufficient to retain said structure against the contacting surface of said chuck during processing.
Dependencies are inferred from the claim text.