Method of manufacturing a piezoelectric tuning fork resonator
AssigneeMyrata Manufacturing Co., Ltd.
InventorHiroaki Kaida
Life of this patent
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Abstract
A piezoelectric tuning fork resonator having a piezoelectric substrate provided with a stepped portion on its end and a tuning fork arm portion formed in the stepped portion. A dummy substrate is arranged adjacent to a side of the piezoelectric substrate and a pair of sealing substrates are pasted onto upper and lower portions of the piezoelectric substrate and the dummy substrate to form a chip type piezoelectric tuning fork resonator. In another embodiment, the piezoelectric substrate includes a resin sealing portion having a hollow portion defined around the tuning fork arm portion so as to form a resin-coated piezoelectric tuning fork resonator.
Claims8
A method of manufacturing a piezoelectric tuning fork resonator by forming tuning fork grooves in a piezoelectric substrate, said method comprising the steps of:
- superposing a plurality of piezoelectric substrates while aligning edges thereof with each other;
- cutting said edges of said superposed piezoelectric substrates for defining cut planes;
- and
- forming tuning fork grooves while setting depths of said tuning fork grooves as measured from said cut planes.
A method of manufacturing a piezoelectric tuning fork resonator using a piezoelectric substrate provided with tuning fork grooves in end thereof, said method comprising the steps of:
- preparing a piezoelectric material block having a width capable of being sliced into a plurality of piezoelectric substrates;
- forming grooves in a cross-directionally extending major surface of said piezoelectric material block for providing tuning fork grooves upon slicing said piezoelectric block into said piezoelectric substrates;
- and
- slicing said piezoelectric material block, provided with said grooves, in a direction perpendicular to said cross direction for forming said piezoelectric substrates.
Dependencies are inferred from the claim text.