Acid soluble photo-resist comprising a photosensitive polymer

A photosensitive polymer comprising:

• ##STR18## wherein x is about 0.05 to 20 mole-%;
• y is about 99.95 to 80 mole-%;
• each R and R.sub.3 are independently hydrogen, C.sub.1-6 branched or unbranched alkyl, alkoxy, aldehyde, carboxyl, oxy, hydroxyl, aryl, aryloxy, halo, cyano, or amino;
• Y.sub.1 is a quaternary heterocyclic nitrogen-containing organic moiety having about 1 to 26 carbon atoms linked through the atoms of the heterocycle, or a quaternary heterocyclic nitrogen-containing organic moiety having about 1 to 26 carbon atoms linked through at least one C.sub.1-6 alkyl substituent;
• Y.sub.2 is a quaternary heterocyclic nitrogen-containing organic moiety having about 1 to 26 carbon atoms;
• Z is hydrogen, alkyl, ester, alkoxy, aldehyde, carboxyl, oxy, hydroxyl, aryl, aryloxy, halo, cyano, amino, or a heterocyclic nitrogen-containing organic moiety having about 1 to 26 carbon atoms;
• and the photosensitive polymer has a molecular weight of about 1,000 to 1,000,000.

A photosensitive polymer comprising:

• ##STR21## wherein x is about to 0.05 to 20 mole-%;
• y is about 0 to 99.95 mole-%;
• z is about 0 to 99.95 mole-%;
• each R and R.sub.3 are independently hydrogen, C.sub.1-6 branched or unbranched alkyl, alkoxy, aldehyde, carboxyl, oxy, hydroxyl, aryl, aryloxy, halo, cyano, or amino;
• Y.sub.1 is a quaternary heterocyclic nitrogen-containing organic moiety having about 1 to 26 carbon atoms linked through the atoms of the heterocycle, or a quaternary heterocyclic nitrogen-containing organic moiety having about 1 to 26 carbon atoms linked through at least one C.sub.1-6 alkyl substituent;
• Y.sub.2 is a quaternary heterocyclic nitrogen-containing organic moiety having about 1 to 26 carbon atoms;
• Z.sub.1 and Z.sub.2 are independently hydrogen, alkyl, ester, alkoxy, aldehyde, carboxyl, oxy, aryl, aryloxy, halo, cyano, amino, or a heterocyclic nitrogen-containing organic moiety having about 1 to 26 carbon atoms;
• and the photosensitive polymer has a molecular weight of about 1,000 to 1,000,000.

A photosensitive polymer comprising a polymer comprising repeating units of the formula:

• ##STR24## wherein each R and R.sub.3 are independently hydrogen, C.sub.1-6 branched or unbranched alkyl, alkoxy, aldehyde, carboxyl, oxy, hydroxyl, aryl, aryloxy, halo, cyano, or amino;
• R.sub.2 is hydrogen or a C.sub.1-12 branched or unbranched alkyl group;
• x is about 0.5 to 20 mole-%;
• y is about 99.5 to 80 mole-%;
• m and n are independently about 0 to 6;
• X.sup.- is an anion selected from the group consisting of halide, alkyl sulfate, alkyl sulfonate, alkyl phosphate, alkyl hexaphosphate, alkyl phosphonate, or boron tetrafluoride;
• Z is C.sub.1-4 alkyl, carboxylic, aryl, benzyl, halo, an amine moiety, or a heterocyclic nitrogen-containing organic moiety having about 1 to 26 carbon atoms;
• and the photosensitive polymer has a molecular weight of about 1,000 to 1,000,000.

A liquid photoresist composition comprising:

• (a) an effective amount of a liquid carrier;
• and
• (b) about 1 to 99 wt-% of a photosensitive polymer having pH sensitive units and units of the formula:
• ##STR25## wherein R is hydrogen, alkyl, alkoxy, aldehyde, carboxyl, oxy, hydroxyl, aryl, aryloxy, halo, cyano, or amino;
• Y.sub.1 is a quaternary heterocyclic nitrogen-containing organic moiety having about 1 to 26 carbon atoms linked through the atoms of the heterocycle, or quaternary heterocyclic nitrogen-containing organic moiety having about 1 to 26 carbon atoms linked through at least one C.sub.1-6 alkyl substituent;
• and Y.sub.2 is a quaternary heterocyclic nitrogen-containing organic moiety having about 1 to 26 carbon atoms.

A photoresist film comprising:

• (a) a photosensitive polymer having pH sensitive units and units of the formula:
• ##STR26## wherein R is hydrogen, alkyl, alkoxy, aldehyde, carboxyl, oxy, hydroxyl, aryl, aryloxy, halo, cyano, or amino;
• Y.sub.1 comprises a quaternary heterocyclic nitrogen-containing organic moiety having about 1 to 26 carbon atoms linked through the atoms of the heterocycle, or a quaternary heterocyclic nitrogen-containing organic moiety having about 1 to 26 carbon atoms linked through at least one C.sub.1-6 alkyl substituent;
• and Y.sub.2 comprises a quaternary heterocyclic nitrogen-containing organic moiety having about 1 to 26 carbon atoms.