Liquid-phase epitaxy growth system and method for growing epitaxial layer
AssigneeSamsung Electronics Co., Ltd.
InventorSong J. Lee
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Abstract
The liquid-phase epitaxy system having the LPE boat consists of of a slider section, a source holder section, and a contacting well section, in which the distance between the first two contacting wells is different from that between the first two source holding wells, so that the concentration of the solutions can be controlled by the proper temperature profile, since the solution for melt-etch and the remaining solution for the epitaxial growth are not filled into the contacting wells at the same time. Thus, the present invention can easily perform the in-situ melt-etch and can improve the quality of the epitaxial layer and the epitaxial yield by minimizing the contamination of the melt-etched surface of the substrate.
Claims7
A liquid-phase epitaxy growing method using a boat comprising a slider section including a slot for receipt of a substrate, a contacting well section containing a plurality of spaced apart contacting wells for selectively contacting solutions within said contacting wells with said substrate, a source holder section containing a plurality of source wells for selectively transferring solutions within said source wells to said contacting wells, and means for controllably heating said boat and materials contained therewithin to selected temperatures, the method comprising:
- forming solutions by dissolving, at a temperature T.sub.1, a source for a melt-etch within one of said source wells, and various sources for expitaxial growths in others of said source wells,
- during a first time period, at said temperature T.sub.1, transferring a solution to one only of said contacting wells, said solution being melt-etch solution from said one source well,
- then, separating said one contacting well from said one source well for isolating said transferred melt-etch solution from said one source well,
- then, while maintaining the isolation of said melt-etch solution from said one source well, transferring, at a temperature T.sub.2, solutions from said others of said source wells to respective ones of said contacting wells,
- then, separating said others of said contacting wells from their respective source wells for isolating the contents of all of said contacting wells from all of said source wells,
- then, while lowering the temperature from T.sub.2, contacting said substrate with the melt-etch solution within said one contacting well for performing in situ melt-etching of said substrate during a time period beginning when the temperature reaches a temperature T.sub.3, which is higher than T.sub.1 and
- growing successive epitaxial layers on said substrate by successively contacting said substrate with solutions from said others of said contacting wells during a time period starting when the temperature reaches a temperature T.sub.4 which is less than T.sub.3.
Dependencies are inferred from the claim text.