Vapor deposition apparatus for using solid starting materials
AssigneeSharp Kabushiki Kaisha
InventorsAkiyoshi Mikami, Takashi Ogura, Kousuke Terada, Masaru Yoshida, Takuo Yamashita, Koichi Tanaka, Katsushi Okibayashi, Shigeo Nakajima, Hiroaki Nakaya, Kouji Taniguchi
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