US 5,332,883 AGranted

Temperature control system for lamp annealer

AssigneeKoyo Seiko Co., Ltd.

InventorHideki Higashira

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Abstract

A system for controlling the temperature of a lamp annealer which system comprises a group of lamps for heating an article to be heated, a radiation thermometer for measuring the temperature of the article, and a lamp output conroller for controlling the output of the lamps based on the output of the thermometer, the controller having stored therein a target temperature control pattern. The system is adapted to effect open-loop control by controlling the lamp output according to a predetermined lamp output control pattern until the thermometer reaches a specified temperature range enabling closed-loop control and not lower than the lowest temperature measurable by the thermometer, to compare the gradient of temperatures measured by the thermometer with the gradient of the target temperature control pattern to determine the ratio of the former to the latter after the output of the thermometer has reached the temperature range, to continue the open-loop control while the gradient ratio is smaller than a predetermined control change-over reference value, and to perform closed-loop control by controlling the lamp output after the gradient ratio has increased to not smaller than the reference value so that the temperature measured matches the target temperature control pattern.

Claims4

Dependent claims

A system for controlling the temperature of a lamp annealer comprising:

(a) a group of lamps for heating an article
(b) a radiation thermometer for measuring the temperature of the article;
(c) a lamp output controller for controlling the heat output of the lamps as a function of the temperature measurement of the radiation thermometer, wherein said lamp output controller comprises:
(1) means for determining and selecting a desired target temperature control pattern and a desired lamp output control pattern;
(2) means for storing said target temperature control pattern;
(3) means for storing said lamp output control pattern;
(4) means for determining a measured temperature gradient from the temperature measurements of the radiation thermometer;
(5) means for determining a target temperature gradient from a portion of said target temperature control pattern that approximates the temperature measurements of the radiation thermometer;
(6) means for calculating a temperature gradient ratio equal to said measured temperature gradient divided by said target temperature gradient;
(7) open-loop control means for controlling the heat output of the lamps according to said lamp output control pattern when said temperature gradient ratio is smaller than a predetermined reference value;
and
(8) closed-loop control means for controlling the heat output of the lamps according to a comparison of the temperature measurements of the radiation thermometer with said target temperature control pattern when said temperature gradient ratio is larger than or equal to said predetermined reference value.

9 more elements

Dependencies are inferred from the claim text.