Ozone beam generation apparatus and method for generating an ozone beam
AssigneeAgency of Industrial Science and Technology
InventorsShunsuke Hosokawa, Masakuni Kawada, Shingo Ichimura, Hiroshi Murakami
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Abstract
An ozone beam generation apparatus includes an ozonizer for forming an ozone-containing gas through the ozonization of an oxygen-containing gas; a refrigerator for liquefying or solidifying only ozone present in the ozone-containing gas; a vessel for storing the liquefied or solidified ozone; a temperature controller for contorting the temperature of the storing vessel and for gasifying the liquefied or solidified ozone; and a piping system for transporting-the gasified ozone to a desired device. The apparatus makes it possible to steadily and safely supply pure ozone to an apparatus for oxidation treatment.
Claims11
An ozone beam generation apparatus comprising;
- ozonizing means for forming an ozone-containing gas through the ozonization of an oxygen-containing gas;
- storing means for liquefying or solidifying ozone in said ozone-containing gas, storing the liquified or solidified ozone, and gasifying said liquified or solidified ozone;
- refrigerating means having a cold head in thermal contact with said storing means for liquefying or solidifying only ozone present in said ozone-containing gas while leaving gas other than ozone contained within said ozone containing gas in a gaseous state and further for gasifying said liquified or solidified ozone;
- means for controlling the temperature of said storing means via said cold head for liquefying ozone in said storing means and for gasifying the liquefied or solidified ozone;
- means for evacuating said gas other than ozone from said storing means;
- and
- a piping system for transporting the gasified ozone to a desired device.
A method for generating an ozone beam comprising the steps of;
- ozonizing an oxygen-containing gas to form an ozone-containing gas;
- refrigerating said ozone-containing gas to liquefy or solidify only ozone present in said ozone-containing gas while leaving gas other than ozone in a gaseous state in an ozone chamber;
- evacuating said gas other than ozone from said ozone chamber to store said liquified or solidified ozone;
- controlling the temperature of said stored ozone to gasify the liquefied or solidified ozone;
- and
- transporting the gasified ozone to a desired device.
Dependencies are inferred from the claim text.