Double-layered ceramic heater
AssigneeShin-Etsu Chemical Co., Ltd.
InventorNoboru Kimura
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Abstract
Proposed is an improved double-layered ceramic heater consisting of an insulating ceramic base plate and two patterned resistance heater element layers formed on both surfaces of the base plate. The improvement comprises forming the patterned heater element layers in such a fashion that the gap space of the heater element layer on one surface, where no heat is evolved by energizing, is opposite face-to-face with the complementary heat-evolving area of the heater element layer on the other surface of the base plate so as to improve uniformity of the temperature distribution over the whole surface of the ceramic heater.
Claims4
In a double-layered ceramic heater consisting of an electrically insulating ceramic base plate and two resistance heater element layers formed on the upper and lower surfaces of the ceramic base plate each in a pattern having, on the surface of the ceramic base plate, a heating area covered by the resistance heater element layer where heat is evolved by electric resistance and a gap area where the resistance heater element layer is not formed, the improvement which comprises forming the resistance heater element layers each in such a patterned fashion that the gap area of the heater element layer on the upper surface of the base plate is opposite face-to-face with the heating area on the lower surface and the gap area on the lower surface of the base plate is opposite face-to-face with the heating area on the upper surface with the ceramic base plate inbetween and wherein the width of the gap space for one of the heater element layers is in the range from 0.5 to 5.0 mm and is smaller than the width of the heating area thereof.
Dependencies are inferred from the claim text.