Plasma CVD of carbonaceous films on substrate having reduced metal on its surface
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorShumpei Yamazaki
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Abstract
A plasma CVD method for forming a carbonaceous material containing diamond or microcrystalline grains therein is disclosed, which comprises placing a substrate in a reaction chamber said substrate provided with reduced Ni, Ge, or Mn on its surface; inputting a carbon compound gas into said reaction chamber; supplying an electric energy to said gas to convert said gas to a plasma; and forming said cabonaceous material on said substrate, wherein said reduced Ni, Ge, or Mn act as seeds on said surface of said substrate to promote formation of said carbonaceous material.
Claims7
A method for forming a carbonaceous material containing diamond or microcrystalline grains therein comprising the steps of:
- placing a substrate in a reaction chamber said substrate provided with reduced Ni, Ge, or Mn on its surface;
- inputting a carbon compound gas into said reaction chamber;
- supplying an electric energy to said gas to convert said gas to a plasma;
- and
- forming said carbonaceous material on said substrate wherein said reduced Ni, Ge, or Mn act as seeds on the surface of said substrate to promote formation of said carbonaceous material.
A method for forming a carbonaceous material containing diamond or microcrystalline grains therein comprising the steps of:
- placing a substrate in a reaction chamber;
- inputting a catalyst gas comprising a compound of Ni, Ge, or Mn with a hydrogen gas into said reaction chamber;
- introducing an electric energy into said reaction chamber to excite said catalyst gas;
- forming a reduced Ni, Ge, or Mn from said catalyst gas on said substrate;
- inputting a carbon containing gas into said reaction chamber in order that said carbon containing gas is excited;
- and then
- forming said carbonaceous material on said substrate wherein said Ni, Ge, or Mn act as seeds on the surface of said substrate to promote formation of said carbonaceous material.
Dependencies are inferred from the claim text.