Oxidation/diffusion processing apparatus
AssigneesTokyo Electron Sagami Limited, Mitsubishi Electric Corporation
InventorsShingo Watanabe, Shinichi Jintate
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Abstract
An oxidation/diffusion processing apparatus includes a processing vessel, arranged such that a longitudinal direction is vertical, for storing a plurality of target objects to be processed, a heater arranged around the processing vessel, for heating the interior of the processing vessel, a process gas supply mechanism for supplying a process gas from the lower portion of the processing vessel into the processing vessel, and an exhaust mechanism for exhausting a processed exhaust gas from the upper portion of the processing vessel. The process gas is supplied to the target objects heated to a predetermined temperature by the heater to perform oxidation/diffusion processing to the target objects.
Claims12
An oxidation/diffusion processing apparatus, comprising:
- a processing vessel, arranged such that a longitudinal direction thereof is vertical, for storing a plurality of target objects to be processed;
- heating means, arranged around said processing vessel, for heating an interior of said processing vessel;
- process gas supply means for supplying a process gas from a lower portion of said processing vessel into said processing vessel, said process gas supply means comprising a process gas supply source and a process gas inlet pipe communicating with both said process gas supply source and a lower portion of said processing vessel;
- and
- exhaust means for exhausting an exhaust gas of process gas from an upper portion of said processing vessel, said exhaust means comprising a gas discharge pipe and an exhaust unit connected to said gas discharge pipe, said gas discharge pipe being open in a central portion inside the processing vessel at an upper end portion of the processing vessel and having a part extending upward within the processing vessel;
- wherein the process gas is supplied to said target objected heated to a predetermined temperature by said heating means to perform oxidation/diffusion processing to said target objects.
An oxidation/diffusion processing apparatus, comprising:
- a processing vessel, arranged such that a longitudinal direction thereof is vertical, for storing a plurality of target objects to be processed;
- heating means, arranged around said processing vessel, for heating an interior of said processing vessel;
- process gas supply means for supplying a process gas from a lower portion of said processing vessel into said processing vessel, said process gas supply means comprising a process gas supply source and a process gas inlet pipe communicating with both said process gas supply source and a lower portion of said processing vessel;
- exhaust means for exhausting an exhaust gas of process gas from an upper portion of said processing vessel, said exhaust means comprising a gas discharge pipe and an exhaust unit connected to said gas discharge pipe, said gas discharge pipe being open in a central portion inside the processing vessel at an upper end portion of the processing vessel and having a part extending upward within the processing vessel;
- and
- purge gas supply means for supplying a purge gas from an upper portion of said processing vessel into said processing vessel;
- wherein the process gas is supplied to said target objects heated to a predetermined temperature by said heating means to perform oxidation/diffusion processing to said target objects, and a gas in said processing vessel is purged by said purge gas supply means when said target objects are loaded and unloaded.
Dependencies are inferred from the claim text.