Thin film integrated circuit resistor

An integrated circuit resistor capable of remaining substantially linear over a large range of applied voltages, comprising:

• a. a substrate;
• b. passivation layer means;
• c. thin film resistance means;
• d. shield means;
• and
• e. said substrate, said passivation layer means, said resistance means and said shield means being arranged relative to each other in such a manner and said resistance means and said shield means being electrically connected in such a manner to maintain said resistance means substantially linear over a large range of applied voltages, wherein:
• said resistance means includes at least two resistive blocks which are electrically connected in series, said shield means includes at least two shields, one for each resistive block, and each of said shields is electrically connected to its associated resistive block,
• each shield includes a first conductive layer means, a second conductive layer means, and a third conductive layer means, said first conductive layer means being positioned between said substrate and said second conductive layer means, and said second conductive layer means being positioned between said first conductive layer means and said third conductive layer means,
• said passivation layer means includes a first passivation layer, a second passivation layer, and a third passivation layer, said first passivation layer being positioned between and in contact with said substrate and each of said first conductive layer means, said said second passivation layer being positioned between and in contact with said first conductive layer means and said second conductive layer means, and said third passivation layer being positioned between and in contact with said second conductive layer means and said third conductive layer means,
• and each of said resistive blocks being coplanar with its associated shield second conductive layer means and located between and in contact with said second and third passivation layers.