Fabrication process for narrow groove
AssigneeGEC-Marconi Limited
InventorSimon G. Ingram
Life of this patent
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Abstract
In a process for producing a narrow groove in a layer of, for example, silicon nitride, a wide groove is first formed in the layer. A layer of a metal, for example aluminium, is evaporated on to one side of the wide groove. The remainder of the wide groove is then filled with a material such a silicon nitride. The metal layer is then etched away, leaving a narrow groove in the silicon nitride equal to the thickness of the metal layer.
Claims10
A process for producing a narrow groove in a layer of a first material, the process comprising the steps of:
- forming a relatively wide groove in said layer of first material;
- depositing on a side wall of said relatively wide groove a layer of aluminum, the thickness of said layer of aluminum being equal to the required narrow groove width;
- filling the remainder of the relatively wide groove with a third material which is the same as or different from said first material;
- and selectively removing said aluminum to produce said narrow groove in the layer of first and third materials without significantly removing said first and third materials.
A process for producing a narrow groove in a layer of a first material, the process comprising the steps of:
- forming a relatively wide groove in said layer of first material;
- depositing over a major surface of said layer of first material and on to a side wall of said relatively wide groove a layer of a second material by evaporating said second material at an oblique angle to said major surface such that the other surfaces of said relatively wide groove are left substantially free of said second material, the thickness of said layer of second material being equal to the required narrow groove width;
- filling the remainder of the relatively wide groove with a third material;
- and selectively removing said second material to produce said narrow groove between said first and third materials without significantly removing said first and third materials.
Dependencies are inferred from the claim text.