Semiconductor device with hydrogen ion intercepting layer
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsMasaaki Ikegami, Tetsuo Higuchi
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AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsMasaaki Ikegami, Tetsuo Higuchi
Estimating the term…
A thin first insulating oxide film is formed on a semiconductor substrate. A thick second insulating oxide film is formed on a semiconductor substrate. A first polysilicon resistance film is formed on the first insulating oxide film. A second polysilicon resistance film is formed on the second insulating oxide film. An insulating protection film, which contains a large amount of hydrogen ion and covers the first polysilicon resistance film, second polysilicon resistance film, first electrode and second electrode, is formed on the semiconductor substrate. A hydrogen ion intercepting film, which prevents passage of hydrogen ion, is interposed between the first insulating oxide film and the first polysilicon resistance film and between the second insulating oxide film and second polysilicon resistance film.
A semiconductor device, comprising:
A semiconductor device comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.