Back to results
US 5,327,223 AGranted
Method and apparatus for generating high resolution optical images
AssigneeInternational Business Machines Corporation
InventorHans-Erdmann Korth
Life of this patent
Estimating the term…
Abstract
A microscope interferometer is described, that scans an object surface through a membrane mask with a multitude of pinholes. Light reflected back through the pinholes interferes with the darkfield image of the mask surface. The mask to object separation can be stabilized by an air flow through the pinholes. Image processing techniques allow to overcome the Abbe diffraction limit for the lateral resolution.
Claims14
A method for achieving a high resolution optical image of a surface of an object comprising the steps of:
- providing a membrane mask having a plurality of pinholes, the object and said mask located so that the surface of the object can receive light through said pinholes;
- illuminating said mask and said object through said pinholes;
- collecting light reflected from the object, passed through said pinholes, and interfering with light reflected from said mask;
- processing the collected light in an image process;
- and
- displaying the image.
3 more elements
A system for high resolution optical inspection of an object, comprising:
- a light source;
- a membrane mask provided with a plurality of pinholes juxtaposed to a surface of the object, said mask further comprising a reflective backside;
- means for projecting light form said light source to said mask and to the object through said pinholes in said mask;
- means for projecting interference formed form superposition of light reflected from said mask and light reflected from the object through pinholes in said mask to a photosensor;
- said photosensor coupled to a processing unit for receiving signals from said photosensor;
- and
- image generation means coupled to said processing unit.
4 more elements
Dependencies are inferred from the claim text.