US 5,326,995 AGranted

Semiconductor device having a heterojunction interface for transporting carriers with improved carrier mobility

AssigneeFujitsu Limited

InventorTatsuya Ohori

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Abstract

A heterojunction semiconductor device comprises a semi-insulating substrate, a channel layer comprising first and second sub-layers provided on the substrate for sustaining a two-dimensional carrier gas therein, a carrier supplying layer of a doped semiconductor material provided on the channel layer, a source electrode a drain electrode and a gate electrode provided on the carrier supplying layer. The first and second sub-layers have respective first and second saturation drift velocities of carriers such that the first saturation drift velocity is substantially larger than said second saturation drift velocity.

Claims10

Dependent claims

A heterojunction semiconductor device comprising:

a semi-insulating substrate having an uppermost surface;
a channel layer, having upper and lower major surfaces and formed on said upper major surface of said semi-insulating substrate, receiving and transporting carriers therethrough, said channel layer including a two-dimensional carrier gas formed therein along said upper major surface of said channel layer and comprising:
an undoped first sub-layer of a first semiconductor material having a lower major surface coincident with said lower major surface of said channel layer and an upper major surface, and
an undoped second sub-layer of a first semiconductor material having a lower major surface coincident with said lower major surface of said channel layer and an upper major surface, and
an undoped second sub-layer of a second semiconductor material having an upper major surface coincident with said upper major surface of said channel layer and a lower major surface formed on said upper major surface of said first sub-layer;
a carrier supplying layer, of a doped third semiconductor material, having upper and lower major surfaces and formed with said lower major surface thereof on said upper major surface of said channel layer, said carrier supplying layer generating said carriers;
a source electrode, formed on and in ohmic contact with said upper major surface of said carrier supplying layer, injecting said carriers into said two-dimensional carrier gas from said carrier supplying layer;
a drain electrode, formed on and in ohmic contact with said upper major surface of said carrier supplying layer and spaced apart from said source electrode, recovering said carriers from said two-dimensional carrier gas via said carrier supplying layer;
a gate electrode, formed on said upper major surface of said carrier supplying layer and between said source and drain electrodes, controlling a flow of said carriers through said two-dimensional carrier gas;
said first and second sub-layers having first and second saturation drift velocities of said carriers, respectively, said first saturation drift velocity being substantially lager than said second saturated drift velocity;
and
said carriers flowing through said two-dimensional carrier gas and being transported through said second sub-layer in a relatively lower energy state of said carriers, a number of said carriers in said two-dimensional carrier gas being transported through said first sublayer upon acceleration of said number of carriers to a relatively higher energy state higher than said relatively lower energy state.

9 more elements

A heterojunction semiconductor device, comprising:

a semi-insulating substrate having an upper major surface;
a channel layer, having upper ran slower major surfaces and formed on said upper major surface of said semi-insulting substrte, receiving and transporting carriers therethrough, said channel layer including a two-dimensional carrier gas formed therein along said upper major surface of said channel layer and comprising:
an undoped first sub-layer of a first semiconductor material having a lower major surface coincident with said lower major surface of said channel layer and an upper major surface, and
an undoped second sub-layer of a second semiconductor material having an upper major surface coincident with said upper major surface of said channel layer and a lower major surface formed on said upper major surface of said first sub-layer;
a carrier supplying layer, of a doped third semiconductor material, having upper and lower major surfaces and formed with said lower major surface thereof on said upper major surface of said channel layer, said carrier supplying layer generating said carriers;
a source electrode, formed on and in ohmic contact with said upper major surface of said carrier supplying layer, injecting said carriers into said tow-dimensional carrier gas from said carrier supplying layer;
a drain electrode, formed on and in ohmic contact with said upper major surface of said carrier supplying layer and spaced apart from said source electrode, recovering said carrier from said two-dimensional carrier gas via said carrier supplying layer;
a gate electrode, formed on said upper major surface of said carrier supplying layer and between said source and drain electrodes, controlling a flow of said carriers through said two-dimensional carrier gas;
said first and second sub-layers having first and second saturation drift velocities of said carriers, respectively, said first saturation drift velocity being substantially larger than said second saturation drift velocity;
and
a buffer layer, having upper and lower major surfaces and interposed between said upper major surface of said semi-insulating substrate and said lower major surface of said channel layer, forming an improved crystal such at said uppermajor surface thereof, said buffer layer comprising an undoped semiconductor material having a composition identical to said third semiconductor material forming said carrier supplying layer.

8 more elements

A therojunction semiconductor device having a source electrode, a drain electrode, a are electrode and a carrier supplying layer with a lower major surface and an upper major surface and creating a supply of carriers, said heterojunction semiconductor device comprising:

a semi-insulating substrate having an upper major surface;
a buffer layer having an upper major surface and a lower major surface and formed with said lower major surface thereof on said upper major surface of said semi-insulating substrate, said buffer layer having a firs electron affinity;
a channel layer receiving the carriers from the carrier supplying layer, said channel layer comprising:
a first sub-layer having an upper major surface and a lower major surface and formed with said lower major surface thereof on said upper major surface of said buffer layer, said first sub-layer having a second electron affinity higher than said first electron affinity,
a second sub-layer having an upper major surface and a lower major surface and formed with said lower major surface thereof on said upper major surface of said first sub-layer, said second sub-layer having a third electron affinity higher than said second electron affinity, sand
a two-dimensional carrier gas formed along said upper major surface of said second sub-layer and receiving the carriers from the carrier supplying layer and transporting the carriers therethrough;
a spacer layer having an upper major surface and a lower major surface and formed with said lower major surface thereof on said two-dimensional carrier gas and said upper major surface in contact with the lower major surface of the carrier supplying layer, said spacer layer having a fourth electron affinity less than said second and third electron affinities and reducing scattering of the carries caused by the carrier supplying layer;
a contact layer having an upper major surface, a lower major surface and a groove extending from said upper major surface to said lower major surface thereof and formed with said lower major surface thereof on said upper major surface of said carrier supplying layer;
said source electrode being formed on and in ohmic contact with said upper major surface of said contact layer, causing the carriers to flow from said carrier supplying layer to said two-dimensional carrier gas;
said drain electrode being formed on and in ohmic contact with said upper major surface of said contact layer and spaced apart from said source electrode, causing the carriers to flow from said two-dimensional carrier gas to said drain electrode through said carrier supplying layer;
said gate electrode being located in said groove and formed on said supper major surface of said carrier supplying layer, controlling the flow of the carries through said two-dimensional carrier gas;
said second sub-layer having a first saturation drift velocity and transporting the carriers when the carriers are in a relatively lower energy state;
and
said first sub-layer having a second saturation drift velocity, higher than said first saturation drift velocity, and transporting the carries when accelerated to a relatively higher energy state higher than said relatively lower energy state.

11 more elements

Dependencies are inferred from the claim text.

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Abstract

A heterojunction semiconductor device comprising:

a semi-insulating substrate having an uppermost surface;
a channel layer, having upper and lower major surfaces and formed on said upper major surface of said semi-insulating substrate, receiving and transporting carriers therethrough, said channel layer including a two-dimensional carrier gas formed therein along said upper major surface of said channel layer and comprising:
an undoped first sub-layer of a first semiconductor material having a lower major surface coincident with said lower major surface of said channel layer and an upper major surface, and
an undoped second sub-layer of a first semiconductor material having a lower major surface coincident with said lower major surface of said channel layer and an upper major surface, and
an undoped second sub-layer of a second semiconductor material having an upper major surface coincident with said upper major surface of said channel layer and a lower major surface formed on said upper major surface of said first sub-layer;
a carrier supplying layer, of a doped third semiconductor material, having upper and lower major surfaces and formed with said lower major surface thereof on said upper major surface of said channel layer, said carrier supplying layer generating said carriers;
a source electrode, formed on and in ohmic contact with said upper major surface of said carrier supplying layer, injecting said carriers into said two-dimensional carrier gas from said carrier supplying layer;
a drain electrode, formed on and in ohmic contact with said upper major surface of said carrier supplying layer and spaced apart from said source electrode, recovering said carriers from said two-dimensional carrier gas via said carrier supplying layer;
a gate electrode, formed on said upper major surface of said carrier supplying layer and between said source and drain electrodes, controlling a flow of said carriers through said two-dimensional carrier gas;
said first and second sub-layers having first and second saturation drift velocities of said carriers, respectively, said first saturation drift velocity being substantially lager than said second saturated drift velocity;
and
said carriers flowing through said two-dimensional carrier gas and being transported through said second sub-layer in a relatively lower energy state of said carriers, a number of said carriers in said two-dimensional carrier gas being transported through said first sublayer upon acceleration of said number of carriers to a relatively higher energy state higher than said relatively lower energy state.

9 more elements