Method of manufacturing shadow mask
AssigneeKabushiki Kaisha Toshiba
InventorsHiroshi Tanaka, Makoto Kudou, Katsumi Ichikawa
Life of this patent
Estimating the term…
Abstract
According to this invention, there is provided an improved method of manufacturing a shadow mask obtained by independently etching both the surfaces of a metal substrate. After one surface is etched to form a first opening, an etching resistive agent composition containing an acrylic resin, casein, and a leveling agent is applied to the obtained opening to form an etching resistive layer. Subsequently, the other surface is etched to form a second opening in the other surface, and then the etching resistive layer is removed to cause the first and second openings to communicate with each other.
Claims16
A method of manufacturing a shadow mask having first and second major surfaces and a plurality of apertures, said apertures having different opening sizes on said first and second major surfaces, comprising the steps of:
- (i) forming photoresist layers on said first and second major surfaces of a metal substrate, respectively;
- (ii) exposing and developing said photoresist layers of said first and second major surfaces to form a first opening resist pattern layer on said first major surface, and to form a second opening resist pattern layer which is different in size from said first opening resist pattern on said second major surface;
- (iii) etching the first major surface to form first openings;
- (iv) after the first opening resist pattern layer is removed, applying an etching resistive agent composition containing an acrylic resin, casein, and a leveling agent to said first major surface to form an etching resistive layer;
- (v) etching the second major surface to form second openings which are different from said first openings in size;
- and
- (vi) removing said etching resistive layer and the second opening resist pattern layer, thereby forming said apertures, each having said first and second openings for communicating with each other.
Dependencies are inferred from the claim text.