A mask read only memory device
AssigneeSamsung Electronics Co., Ltd.
InventorsJeong-Hyeok Choi, Chul-Ho Shin
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AssigneeSamsung Electronics Co., Ltd.
InventorsJeong-Hyeok Choi, Chul-Ho Shin
Estimating the term…
A method for manufacturing highly integrated NAND and NOR logic mask read only memory (MROM) devices is disclosed. Over the top surface of a semiconductor substrate, where a first polysilicon layer is formed, a pattern of a gate electrode is formed along a word line in the order of odd numbers or even numbers. Next, an insulation layer having a thickness of a submicron range is formed over the top surface of the substrate. And then a photoresist is covered and an etch back process is performed. Thereafter, the exposed insulation layer caused by the etch back process and the polysilicon layer are selectively etched to form a word line spacing corresponding to a thickness of the insulation layer. Thus, spacing between adjacent word lines can be minimized and a process margin can be sufficiently ensured.
A mask read only memory device for programming a given cell by an ion implantation of impurities, comprising:
A logic mask ROM, comprising:
A logic mask ROM, comprising:
A memory device, comprising:
Dependencies are inferred from the claim text.