Method for making free-standing diamond film
AssigneeNorton Company
InventorsMatthew Simpson, Robert M. Frey
Life of this patent
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Abstract
A method for making a free-standing synthetic diamond film of desired thickness, including the following steps: providing a substrate; selecting a target thickness of diamond to be produced, the target thickness being in the range 200 microns to 1000 microns; finishing a surface of the substrate to a roughness, R.sub.A, that is a function of the target thickness, the roughness being determined from ##EQU1## where t is the target thickness; depositing an interlayer on the substrate, the interlayer having a thickness in the range 1 to 20 microns; depositing synthetic diamond on the interlayer, by chemical vapor deposition, to about the target thickness; and cooling the synthetic diamond to effect the release thereof.
Claims18
A method for making a free-standing synthetic diamond film of a target thickness, comprising the steps of:
- providing a substrate;
- selecting a target thickness of diamond to be produced, said target thickness being in the range 200 microns to 1000 microns;
- finishing a surface of the substrate to a roughness, R.sub.A, that is a function of the target thickness, said roughness being determined from ##EQU4## where t is the target thickness;
- depositing an interlayer on said substrate, the interlayer having a thickness in the range from 1 to 20 microns;
- depositing synthetic diamond on said interlayer, by chemical vapor deposition, to about the target thickness;
- and
- cooling said synthetic diamond to effect the release thereof.
Dependencies are inferred from the claim text.