Immersion cleaning device
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorMasaaki Sadamori
Life of this patent
Estimating the term…
Abstract
An immersion cleaning device is provided with concave portions housing respective chemical baths into which a workpiece is selectively immersed. Any gas and mist generated from the chemical baths is exhausted from the concave portions. A transportation element has a portion to hold a workpiece with takes the workpiece into or out from the chemical bath. A controller is included to control operation of transportation means. An enclosure body moves with the holding portion and is moved with the workpiece to substantially enclose any gases and chemical mist generated during the transportation. Corrosion of the device and pollution which might be caused by leaks of gases and mist to the outside are thus prevented.
Claims4
An immersion cleaning device, comprising:
- a plurality of concave portions each housing a chemical bath containing a respective chemical for immersion therein of a workpiece;
- first exhaust means to exhaust an inside of each of the concave portions;
- transportation means provided with a holding portion for holding said workpiece while said workpiece is moved to selected ones of said chemical baths, said holding portion also being movable for taking said workpiece into and out of said selected chemical baths;
- controller means for controlling operation of said transportation means and said holding portion thereof;
- and
- an enclosure body of a fixed and predetermined shape and size selected to enclose said workpiece and said holding portion, said enclosure body being disposed in engagement with said holding portion so as to be moved therewith to said selected chemical baths by said transportation means.
Dependencies are inferred from the claim text.