Method of preventing the corrosion of metallic wirings
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsTomoyasu Murakami, Michinari Yamanaka, Kousaku Yano, Masayuki Endo, Noboru Nomura, Staoshi Ueda, Naoto Matsuo, Hiroshi Imai, Masafumi Kubota
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Abstract
According to the method of preventing the corrosion of metallic wirings of the present invention, aluminium alloy wirings are formed on the surface of a substrate with the use of photoresists, and the photoresists are then removed. Thereafter, HMDS (hexamethyl disilazine) serving as a surface-active agent or its derivative is supplied to the aluminium alloy wirings to form hydrophobic molecular layers on the lateral walls of the aluminium alloy wirings.
Claims9
A method of preventing the corrosion of metallic wirings comprising:
- a first step of forming a metallic film on a substrate;
- a second step of dry-etching said metallic film with chlorine-containing gas to form, in a desired pattern, metallic wirings made of said metallic film;
- and
- a third step of supplying a surface-active agent or its derivative to said metallic wirings to form hydrophobic molecular layers on the lateral walls of said metallic wirings.
Dependencies are inferred from the claim text.